Mechanical and electrical properties of ultra-thin chips and flexible electronics assemblies during bending

被引:31
作者
van den Ende, D. A. [1 ]
van de Wiel, H. J. [2 ]
Kusters, R. H. L. [1 ]
Sridhar, A. [1 ]
Schram, J. F. M. [1 ]
Cauwe, M. [3 ]
van den Brand, J. [1 ]
机构
[1] TNO, HTC31, Holst Ctr, NL-5605 KN Eindhoven, Netherlands
[2] TNO, NL-5626 AP Eindhoven, Netherlands
[3] Imec Cmst, B-9052 Zwijnaarde, Belgium
关键词
Ultra-thin chips; Flexible electronics; Bending strength; Minimum bending radius; SILICON DIE; STRENGTH; DESIGN;
D O I
10.1016/j.microrel.2014.07.125
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ultra-thin chips of less than 20 gm become flexible, allowing integration of silicon IC technology with highly flexible electronics such as food packaging sensor systems or healthcare and sport monitoring tags as wearable patches or even directly in clothing textile. The ultra-thin chips in these products will be bent to a very high curvature, which puts a large strain on the chips during use. In this paper a modified four-point bending method is presented, which is capable of measuring chip stress at high curvatures. The strength of several types of ultra-thin chips is evaluated, including standalone ultra-thin test chips and back-thinned 20 pm thick microcontrollers, as well as assemblies containing integrated ultra-thin microcontroller chips. The effect of chip thickness, bending direction and backside finish on strength and minimum bending radius is investigated using the modified four point bending method. The effect of bonding ultra-thin chips to flexible foils on the assembly strength and minimum bending radius is evaluated as well as the effect of bending on electrical properties of the bonded microcontroller dies. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2860 / 2870
页数:11
相关论文
共 33 条
  • [1] [Anonymous], SOL STAT CIRC C 2008
  • [2] Flip chip assembly of thinned silicon die on flex substrates
    Banda, Charles
    Johnson, R. Wayne
    Zhang, Tan
    Hou, Zhenwei
    Charles, Harry K.
    [J]. IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, 2008, 31 (01): : 1 - 8
  • [3] Baratta FI, 1987, 8735 MTL TR US ARM, P8
  • [4] Burghartz JN, 2011, ULTRA-THIN CHIP TECHNOLOGY AND APPLICATIONS, P1, DOI 10.1007/978-1-4419-7276-7
  • [5] Ultra-thin chip technology and applications, a new paradigm in silicon technology
    Burghartz, Joachim N.
    Appel, Wolfgang
    Harendt, Christine
    Rempp, Horst
    Richter, Harald
    Zimmermann, Martin
    [J]. SOLID-STATE ELECTRONICS, 2010, 54 (09) : 818 - 829
  • [6] Smart textiles: Challenges and opportunities
    Cherenack, Kunigunde
    van Pieterson, Liesbeth
    [J]. JOURNAL OF APPLIED PHYSICS, 2012, 112 (09)
  • [7] Choi WD, 2011, J CERAM PROCESS RES, V12, P509
  • [8] Creemer JF, 2011, ULTRATHIN CHIP TECHN
  • [9] Bendable Ultra-Thin Chips on Flexible Foils
    Dahiya, Ravinder S.
    Gennaro, Salvatore
    [J]. IEEE SENSORS JOURNAL, 2013, 13 (10) : 4030 - 4037
  • [10] Ende DA, 2013, P SMART SYST INT C A