Filter-less fluorescence sensor with high separation ability achieved by the suppression of forward-scattered light in silicon

被引：8

作者：

Choi, Yong Joon ^{[1
]}

Takahashi, Kazuhiro ^{[1
]}

Matsuda, Motoharu ^{[1
]}

Hizawa, Takeshi ^{[1
]}

Moriwaki, Yu ^{[1
]}

Dasai, Fumihiro ^{[1
]}

Kimura, Yasuyuki ^{[1
]}

Akita, Ippei ^{[1
]}

Iwata, Tatsuya ^{[1
]}

Ishida, Makoto ^{[1
]}

Sawada, Kazuaki ^{[1
]}

机构：

[1] Toyohashi Univ Technol, Dept Elect & Elect Informat Engn, Toyohashi, Aichi 4418580, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 04期

基金：

日本科学技术振兴机构; 日本学术振兴会;

关键词：

DNA ANALYSIS; SYSTEM; DETECTOR; ARRAYS;

D O I：

10.7567/JJAP.55.04EM10

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The improvement of a filter-less fluorescence sensor, by suppressing forward scattering in silicon by surface planarization is presented. A fluorescence microscope has been widely used in biochemical fields. However, it is difficult to miniaturize because optical filters and other parts are necessary. We previously developed a filter-less fluorescence sensor. The separation ability of excitation light and fluorescence in the previous device was 550: 1. It is necessary to improve the separation ability. This study focuses on the suppression of forward-scattered incident light in silicon, through the enhanced surface planarization of polysilicon, which is the gate electrode material. The separation ability of the filter-less fluorescence sensor was increased from 550: 1 to 1250: 1 by the suppression of forward-scattered light. (C) 2016 The Japan Society of Applied Physics

引用

页数：6

共 28 条

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