Highly piezoelectric AlN thin films grown on amorphous, insulating substrates

AlN thin films were grown by reactive sputtering on amorphous SiO2 thin films. Film texture, x-ray rocking curve width, mechanical stress, and the clamped piezoelectric constant d(33,f) were studied as a function of rf bias power and substrate roughness. A high d(33,f) of 5.0 pm/V was achieved at low substrate roughness and low mechanical AlN film stress. Increasing substrate roughness and stress leads to a deterioration of d(33,f), which is correlated with a higher density of opposite polarity grains detected by piezoresponse force microscopy. Extrapolating to 100% uniform polarity, a d(33,f) of 6.1 pm/V is derived as highest possible value, probably corresponding to the d(33,f)=e(33)/c(33)(E) of perfect single crystalline material. Growth mechanisms are proposed and underlined by high resolution transmission electron microscopy to explain the observed phenomena.