High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate

被引：41
作者：
Assila, Najoua [1 ,2 ]
Kadota, Michio [1 ]
Tanaka, Shuji [1 ]
机构：
[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan
[2] Univ Montreal, EKSAP, Montreal, PQ H3T 1J4, Canada
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2019年 / 66卷 / 09期
关键词：
High frequency; Lamb waves; LiTaO3; resonator; temperature coefficient of frequency (TCF); THIN-FILM; SUBSTRATE;
D O I：
10.1109/TUFFC.2019.2923579
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Acoustic wave devices utilizing plate waves in thin lithium tantalate (LiTaO3) have the potential of achieving high resonance frequency with a suitable electromechanical coupling factor and a relatively small temperature coefficient of frequency (TCF). The influence of Euler angle and plate thickness on the characteristics of plate waves has been investigated. High-frequency resonators using first antisymmetric Lamb wave mode (A(1)) in (0 degrees, 42 degrees, 0 degrees) LiTaO3 thin plates have been fabricated and optimized. The resonance frequency is as high as 5 GHz, with a relative bandwidth of 7.3% and an impedance ratio of 72 dB. Finally, the TCF of (0 degrees, 42 degrees, 0 degrees) LiTaO3 has been evaluated. Therefore, it is proved that A(1) Lamb wave mode propagating in LiTaO3 at a Euler angle close to (0 degrees, 42 degrees, 0 degrees) is suitable for high-frequency devices.
引用
收藏
页码：1529 / 1535
页数：7
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