Investigations regarding structure and optical properties of HfO2 films

被引：2
作者：
Czigany, Z
Mademann, D
Weissbrodt, P
Hacker, E
机构：
[1] Hungarian Acad Sci, Tech Phys Res Inst, H-1325 Budapest, Hungary
[2] Jenopt Laser Opt Syst Gmbh, D-07739 Jena, Germany
来源：
SOLID STATE PHENOMENA | 1997年 / 56卷
关键词：
HfO2; UV irradiation; laser damage; optical properties; transmission electron microscopy; columnar structure; texture; porosity;
D O I：
10.4028/www.scientific.net/SSP.56.233
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：233 / 238
页数：6
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