Electromechanical energy converters of micromechanic devices on the basis of ferroelectric films

被引：14

作者：

Dyatlov, VL

Kostsov, EG ^{[1
]}

机构：

[1] RAS, Inst Automat & Electrometry, SB, Novosibirsk, Russia

[2] RAS, Inst Math, SB, Novosibirsk, Russia

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1998年 / 405卷 / 2-3期

关键词：

D O I：

10.1016/S0168-9002(97)00152-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The peculiarities of flexible metallic film electrostatic rolling on the ferroelectric film surface are studied. The efficiency of electromechanical energy conversion is shown to be significantly higher on executing of the process mentioned, that on application of reversed piezoelectric effect.

引用

页码：511 / 513

页数：3

共 8 条

[1] PROSPECTS OF THE EMPLOYMENT OF SYNCHROTRON-RADIATION IN FILM ELECTROSTATIC ACTUATOR TECHNOLOGY
DYATLOV, VL
KONYASHKIN, VV
POTAPOV, BS
PYANKOV, YA
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[2] DYATLOV VL, 1996, ELECTRICITY, V1, P8
[3] DYATLOV VL, 1996, OPTOELECTRONICS INST, V2, P101
[4] Kostsov E. G., 1995, Ferroelectrics, V167, P169, DOI 10.1080/00150199508232310
[5] LARGE-SCALE USE OF FERROELECTRICITY IN MICROELECTRONICS IS REALITY
KOSTSOV, EG
MALINOVSKY, VK
[J]. FERROELECTRICS, 1989, 94 : 457 - 462
[6] KOSTSOV EG, 1996, RUSSIAN MICROELECTRO, V3, P177
[7] LAVRINENKO VV, 1980, ENERGY, P112
[8] SCOTT JE, 1992, CONDENSED MATTER NEW, V3, P16

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