Proposals for producing novel periodic structures by ion bombardment sputtering

被引:14
作者
Carter, G [1 ]
机构
[1] Univ Salford, Inst Mat, Joule Phys Lab, Salford M5 4WT, Lancs, England
关键词
sputtering; multiple ion fluxes; superimposed ripple patterns; rotating targets; circular ripple patterns;
D O I
10.1016/j.vacuum.2004.07.082
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It is proposed, and confirmed analytically that if multiple ion fluxes are incident simultaneously, all at the same oblique polar angle but at different azimuthal angles, on to a target then the individual ripple patterns generated by sputtering are superimposed to produce novel Surface structures. It is also shown that single focused ion fluxes incident on to rotating targets can produce circular ripple patterns. (C) 2004 Published by Elsevier Ltd.
引用
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页码:97 / 100
页数:4
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