Real-time measurement of spindle thermal deformation using interferometers

被引：1
作者：
Song, DQ [1 ]
Zeng, LJ [1 ]
Yin, CY [1 ]
机构：
[1] Tsing Hua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments, Beijing 100084, Peoples R China
来源：
OPTICAL ENGINEERING | 2000年 / 39卷 / 08期
关键词：
spindle thermal deformation; real-time measurement; noncontact measurement; single-beam interferometer; vertical machine center;
D O I：
10.1117/1.1305458
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In modern manufacturing, the main workpiece error results from spindle thermal deformation. We introduce a method to measure spindle thermal deformation using three single-beam interferometers. Ours is a noncontact, real-time measurement method that can be carried out while the spindle is rotating. An experiment is performed on a vertical machine center, and a measurement uncertainty of 1.0 mu m is obtained for a spindle thermal deformation of 50 mu m. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)01808-0].
引用
收藏
页码：2114 / 2118
页数：5
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