Real-time measurement of spindle thermal deformation using interferometers

被引：1

作者：

Song, DQ ^{[1
]}

Zeng, LJ ^{[1
]}

Yin, CY ^{[1
]}

机构：

[1] Tsing Hua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments, Beijing 100084, Peoples R China

来源：

OPTICAL ENGINEERING | 2000年 / 39卷 / 08期

关键词：

spindle thermal deformation; real-time measurement; noncontact measurement; single-beam interferometer; vertical machine center;

D O I：

10.1117/1.1305458

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In modern manufacturing, the main workpiece error results from spindle thermal deformation. We introduce a method to measure spindle thermal deformation using three single-beam interferometers. Ours is a noncontact, real-time measurement method that can be carried out while the spindle is rotating. An experiment is performed on a vertical machine center, and a measurement uncertainty of 1.0 mu m is obtained for a spindle thermal deformation of 50 mu m. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)01808-0].

引用

页码：2114 / 2118

页数：5

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