Real-time measurement of spindle thermal deformation using interferometers

被引：1
|
作者：
Song, DQ [1 ]
Zeng, LJ [1 ]
Yin, CY [1 ]
机构：
[1] Tsing Hua Univ, State Key Lab Precis Measurement Technol & Instru, Dept Precis Instruments, Beijing 100084, Peoples R China
来源：
OPTICAL ENGINEERING | 2000年 / 39卷 / 08期
关键词：
spindle thermal deformation; real-time measurement; noncontact measurement; single-beam interferometer; vertical machine center;
D O I：
10.1117/1.1305458
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In modern manufacturing, the main workpiece error results from spindle thermal deformation. We introduce a method to measure spindle thermal deformation using three single-beam interferometers. Ours is a noncontact, real-time measurement method that can be carried out while the spindle is rotating. An experiment is performed on a vertical machine center, and a measurement uncertainty of 1.0 mu m is obtained for a spindle thermal deformation of 50 mu m. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)01808-0].
引用
收藏
页码：2114 / 2118
页数：5
相关论文
共 50 条
  • [1] The measurement of thermal deformation in BGA assemblies using Real-Time Holographic Interferometry
    Wang, WN
    Wu, YP
    Zhang, LF
    Ai, L
    MICRO MATERIALS, PROCEEDINGS, 2000, : 630 - 633
  • [2] Research on the thermal deformation pseudo-lag and real-time compensation for CNC machine tool spindle
    School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China
    Jixie Gongcheng Xuebao, 23 (129-135):
  • [3] Real-time measurement of thermal comfort by using an open networking technology
    Tse, Wal Leung
    Chan, Wal Lok
    MEASUREMENT, 2007, 40 (06) : 654 - 664
  • [4] Measurement Error Analysis of Spindle Thermal Deformation
    Qi, X. Y.
    Gao, W. G.
    Zhang, D. W.
    Cui, L. Y.
    Zhang, H. J.
    ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY XIV, 2012, 697-698 : 229 - 234
  • [5] REAL-TIME MEASUREMENT OF LARGE LIQUID SURFACE DEFORMATION USING A HOLOGRAPHIC SHEARING INTERFEROMETER
    MATSUDA, K
    WATANABE, S
    EIJU, T
    APPLIED OPTICS, 1985, 24 (24): : 4443 - 4447
  • [6] REAL-TIME MEASUREMENT OF LARGE LIQUID SURFACE DEFORMATION USING A HOLOGRAPHIC SHEARING INTERFEROMETER
    MATSUDA, K
    WATANABE, S
    EIJU, T
    JOURNAL OF MECHANICAL ENGINEERING LABORATORY, 1991, 45 (03): : 101 - 108
  • [7] Real-Time Measurement of Aerodynamic Deformation of Wing by Laser Rangefinder
    Li, Xiaolu
    Xu, Lijun
    Tan, Cheng
    Tian, Xiangrui
    2010 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE I2MTC 2010, PROCEEDINGS, 2010,
  • [8] REAL-TIME CONTROL OF SPINDLE RUNOUT
    BIFANO, TG
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 508 : 38 - 45
  • [9] REAL-TIME CONTROL OF SPINDLE RUNOUT
    BIFANO, TG
    DOW, TA
    OPTICAL ENGINEERING, 1985, 24 (05) : 888 - 892
  • [10] Real-time monitoring and simulation of thermal deformation in plastic package
    Zhu, J.
    Zou, D.
    Liu, S.
    Journal of Electronic Packaging, Transactions of the ASME, 1998, 120 (02): : 160 - 165
12345