Utilizing the interface adsorption of nitrogen for the growth of high-quality GaInAsN/GaAs quantum wells by metal organic chemical vapor deposition for near infrared applications

被引:18
作者
Albo, Asaf [1 ]
Cytermann, Catherine [3 ]
Bahir, Gad [1 ]
Fekete, Dan [2 ]
机构
[1] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel
[3] Technion Israel Inst Technol, Inst Solid State, Surface Sci Lab, IL-32000 Haifa, Israel
关键词
adsorption; diffusion; gallium arsenide; gallium compounds; III-V semiconductors; indium compounds; MOCVD; nitrogen; photoluminescence; secondary ion mass spectra; semiconductor growth; semiconductor quantum wells; time of flight mass spectra; wide band gap semiconductors; GAINNAS; DIFFUSION;
D O I
10.1063/1.3360216
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated the composition and optical properties of GaInAsN/GaAs single quantum wells grown using metal organic chemical vapor epitaxy at 500 degrees C. Using time-of-flight secondary ion mass spectrometry and photoluminescence spectroscopy, we have shown the presence of a 1-2 nm thick nitrogen-rich interfacial layer at the first interface grown. The inhomogeneous asymmetric distribution of nitrogen atoms along the growth direction is attributed to the dominance of surface kinetics, nonlinear dependence of N incorporation on In content, and the strain gradient effect on the effective diffusion of N. We have utilized this finding to grow high quality quantum wells.
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页数:3
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