Utilizing the interface adsorption of nitrogen for the growth of high-quality GaInAsN/GaAs quantum wells by metal organic chemical vapor deposition for near infrared applications
被引:18
作者:
Albo, Asaf
论文数: 0引用数: 0
h-index: 0
机构:
Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, IsraelTechnion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
Albo, Asaf
[1
]
Cytermann, Catherine
论文数: 0引用数: 0
h-index: 0
机构:
Technion Israel Inst Technol, Inst Solid State, Surface Sci Lab, IL-32000 Haifa, IsraelTechnion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
Cytermann, Catherine
[3
]
Bahir, Gad
论文数: 0引用数: 0
h-index: 0
机构:
Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, IsraelTechnion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
Bahir, Gad
[1
]
Fekete, Dan
论文数: 0引用数: 0
h-index: 0
机构:
Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, IsraelTechnion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
Fekete, Dan
[2
]
机构:
[1] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel
[2] Technion Israel Inst Technol, Dept Phys, IL-32000 Haifa, Israel
[3] Technion Israel Inst Technol, Inst Solid State, Surface Sci Lab, IL-32000 Haifa, Israel
adsorption;
diffusion;
gallium arsenide;
gallium compounds;
III-V semiconductors;
indium compounds;
MOCVD;
nitrogen;
photoluminescence;
secondary ion mass spectra;
semiconductor growth;
semiconductor quantum wells;
time of flight mass spectra;
wide band gap semiconductors;
GAINNAS;
DIFFUSION;
D O I:
10.1063/1.3360216
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
We have investigated the composition and optical properties of GaInAsN/GaAs single quantum wells grown using metal organic chemical vapor epitaxy at 500 degrees C. Using time-of-flight secondary ion mass spectrometry and photoluminescence spectroscopy, we have shown the presence of a 1-2 nm thick nitrogen-rich interfacial layer at the first interface grown. The inhomogeneous asymmetric distribution of nitrogen atoms along the growth direction is attributed to the dominance of surface kinetics, nonlinear dependence of N incorporation on In content, and the strain gradient effect on the effective diffusion of N. We have utilized this finding to grow high quality quantum wells.