Mirror materials for synchrotron radiation optics

被引：15

作者：

Paquin, RA ^{[1
]}

Howells, MR ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Adv Light Source, Berkeley, CA 94720 USA

来源：

MATERIALS, MANUFACTURING, AND MEASUREMENT FOR SYNCHROTRON RADIATION MIRRORS | 1997年 / 3152卷

关键词：

materials; metals; mirrors; optics; silicon silicon carbide; synchrotron radiation; x-ray;

D O I：

10.1117/12.295549

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Current optical finishing technology limits the choices for synchrotron radiation materials to a relatively few materials: fused silica and ULE(TM), silicon CVD silicon CVD silicon carbide, and electroless nickel. We review, in a general way, those materials and several others that can be finished to the required figure and finish levels, generally considered to be < 3 microradians rms and < 5 Angstrom rms. With the objective of material choices for synchrotron beam line mirrors in mind, we briefly discuss dimensional stability, cooling, bending, polishing, and manufacturing procedures. After discussing specific materials: those previously mentioned and aluminum, Glidcop(TM), invars, and steels, we conclude that metals are best from an engineering and cost standpoint, but ceramics, including silicon me best from a polishing standpoint.

引用

页码：2 / 16

页数：15