Discovery-based design of transparent conducting oxide films

被引:319
作者
Exarhos, Gregory J. [1 ]
Zhou, Xiao-Dong [1 ]
机构
[1] Pacific NW Natl Lab, Richland, WA 99352 USA
关键词
transparent conducting oxide; conductivity; transparency; modeling; film deposition;
D O I
10.1016/j.tsf.2007.03.014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The properties of TCO materials derive from the nature, number, and atomic arrangements of metal cations in crystalline or amorphous oxide structures, from the resident morphology, and from the presence of intrinsic or intentionally introduced defects. An enormous body of literature can be accessed from which empirical relationships between structure, composition, charge transport, and transparency have been developed. Previous reviews of this subject have indicated how such information may be used for engineering TCO properties; however, application of more rigorous science-based approaches to the design of materials with superior properties has only recently been tackled. This article summarizes current TCO research results, reviews processing approaches, presents a microscopic description of electronic conductivity in transparent metal oxide systems, and offers guidelines for the design and subsequent development of new materials. The review concludes with a glimpse of some recent work where impedance matching and quantum mechanical tunneling approaches would seem to provide future directions for improving transmissivity in these and similar conducting oxide systems. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:7025 / 7052
页数:28
相关论文
共 229 条
  • [1] Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films
    Agashe, C
    Kluth, O
    Hüpkes, J
    Zastrow, U
    Rech, B
    Wuttig, M
    [J]. JOURNAL OF APPLIED PHYSICS, 2004, 95 (04) : 1911 - 1917
  • [2] Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications
    Agashe, C
    Kluth, O
    Schöpe, G
    Siekmann, H
    Hüpkes, J
    Rech, B
    [J]. THIN SOLID FILMS, 2003, 442 (1-2) : 167 - 172
  • [3] Low-resistive and transparent AZO films prepared by PLD in magnetic field
    Agura, H
    Okinaka, H
    Hoki, S
    Aoki, T
    Suzuki, A
    Matsushita, T
    Okuda, M
    [J]. ELECTRICAL ENGINEERING IN JAPAN, 2005, 151 (02) : 40 - 45
  • [4] Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition
    Agura, H
    Suzuki, A
    Matsushita, T
    Aoki, T
    Okuda, M
    [J]. THIN SOLID FILMS, 2003, 445 (02) : 263 - 267
  • [5] ELECTRICAL, OPTICAL AND ANNEALING CHARACTERISTICS OF ZNO-AL FILMS PREPARED BY SPRAY PYROLYSIS
    AKTARUZZAMAN, AF
    SHARMA, GL
    MALHOTRA, LK
    [J]. THIN SOLID FILMS, 1991, 198 (1-2) : 67 - 74
  • [6] The structure and properties of copper oxide and copper aluminium oxide coatings prepared by pulsed magnetron sputtering of powder targets
    Alkoy, EM
    Kelly, PJ
    [J]. VACUUM, 2005, 79 (3-4) : 221 - 230
  • [7] ALTAMIRANOJUARE.DC, 2001, SUPERFICIES VACIO, V13, P66
  • [8] Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature
    Assunçao, V
    Fortunato, E
    Marques, A
    Aguas, H
    Ferreira, I
    Costa, MEV
    Martins, R
    [J]. THIN SOLID FILMS, 2003, 427 (1-2) : 401 - 405
  • [9] ATTYGALLE D, 2001, ECS 210 M ABSTR, V1554
  • [10] Badeker K, 1907, ANN PHYS-BERLIN, V22, P749