Gas Flow Meter based on Calorimetric Flow Microsensor

被引：0

作者：

Sazhin, Oleg ^{[1
]}

机构：

[1] Ural Fed Univ, Ekaterinburg 620000, Russia

来源：

PROCEEDINGS OF THE 29TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS | 2014年 / 1628卷

关键词：

thermal flow sensor; mass flow rate; heat and mass transfer; micro-electro-mechanical systems;

D O I：

10.1063/1.4902665

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A prototype of mass gas flow meter was developed on the basis of calorimetric flow microsensor. Design and manufacturing technology of the flow meter were elaborated. Test procedure was carried out and results were provided. Developed prototype of flow meter can diagnose gas mass flow rates in a wide range.

引用

页码：725 / 732

页数：8

共 5 条

[1] [Anonymous], 2004, MEMS MECH SENSORS
[2] Li Dongqing, 2008, ENCY MICRO AND NANOF
[3] Pervushin YuV, 2006, Russian Federation patent, Patent No. 2343420
[4] Novel mass air flow meter for automobile industry based on thermal flow microsensor. I. Analytical model and microsensor
Sazhin, Oleg
[J]. FLOW MEASUREMENT AND INSTRUMENTATION, 2013, 30 : 60 - 65
[5] Prototype of Calorimetric Flow Microsensor
Sazhin, Oleg
[J]. 28TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS 2012, VOLS. 1 AND 2, 2012, 1501 : 837 - 842

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