Identification of dislocation-related and point-defects in III-As layers for silicon photonics applications

被引:7
作者
Zenari, Michele [1 ]
Buffolo, Matteo [1 ]
De Santi, Carlo [1 ]
Norman, Justin [2 ,3 ]
Meneghesso, Gaudenzio [1 ]
Bowers, John E. [2 ]
Zanoni, Enrico [1 ]
Meneghini, Matteo [1 ]
机构
[1] Univ Padua, Dept Informat Engn, I-35131 Padua, Italy
[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[3] Quintessent Inc, Goleta, CA USA
关键词
InAs; quantum dots; DLTS; dislocation; GaAs; silicon photonics;
D O I
10.1088/1361-6463/abf9dc
中图分类号
O59 [应用物理学];
学科分类号
摘要
The aim of this paper is to identify, analyze and compare the defects present in III-As, as a function of dislocation density, and as a function of the presence/absence of quantum dots (QDs). Such materials are of fundamental importance for the development of lasers and photodiodes for silicon photonics. The study is based on an extensive deep-level transient spectroscopy investigation, carried out on GaAs pin diodes grown on Si and on GaAs (that differ in the dislocation density), with and without embedded QDs. The original results described in this paper demonstrate that: (a) we were able to identify four different defects within the device grown on Si (three electron and one hole traps) and one defect (hole trap) in the device on GaAs, common to both samples; (b) all the majority carrier traps identified are located near midgap, i.e. are efficient non-radiative recombination centers; (c) such defects are absent (or non-detectable) in the sample grown on GaAs substrate, having a very low dislocation density; (d) the presence of QDs does not result in additional defects within the semiconductor material; (e) the analysis of the capture kinetics revealed that two of the identified traps are related to point defects, whereas the other two traps can be associated with point defects located near a dislocation; (f) a comparison with previous reports indicate that the detected traps are related to native III-As defects, or to oxygen-related complexes.
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页数:8
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