Analyses of Responsivity and Quantum Efficiency of p-Si/i-β-FeSi2/n-Si Photodiodes

被引:4
作者
Huang, Jung-Sheng [1 ]
Lee, Kuan-Wei [1 ]
Huang, Cheng-Yao [1 ]
Wang, Shih-Feng [2 ]
机构
[1] I Shou Univ, Dept Elect Engn, 1 Sec 1,Syuecheng Rd, Kaohsiung 84001, Taiwan
[2] Air Force Inst Technol, Dept Aviat & Commun Elect, Kaohsiung 820, Taiwan
关键词
p-Si/i-beta-FeSi2/n-Si photodiode; responsivity; quantum efficiency; FILMS;
D O I
10.18494/SAM.2018.1795
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this study the responsivity and quantum efficiency of p-Si/i-beta-FeSi2/n-Si double-heterostructure photodiodes and p-Si/i-Si/n-Si photodiodes are investigated by self-developed analytical methods. The dark current densities of both beta-FeSi2 and Si p-i-n photodiodes under the reverse bias condition are calculated by solving the diffusion current densities of minority carriers. The photocurrent densities of both p-i-n photodiodes under illumination with reverse bias are mainly calculated by solving the drift current densities in the depletion regions. When the beta-FeSi2 p-i-n photodiode incident wavelength, lambda, is less than 0.6 mu m, the magnitudes of responsivity and quantum efficiency are almost zero for different intrinsic thicknesses. The maximum responsivity, R = 0.65 A/W, and quantum efficiency, eta = 65%, are both at lambda = 1.2 mu m and the intrinsic beta-FeSi2 layer thickness is 100 mu m. The calculated responsivity of the Si p-i-n photodiode is consistent with the reported studies. Therefore, the analysis methods and results are valid in this work. These results indicate the high applicability of beta-FeSi2 to near-infrared photodiodes integrated with Si. Therefore, the p-Si/i-beta-FeSi2/n-Si photodiode is a new high-efficiency light sensor device applicable to optical fiber communications.
引用
收藏
页码:925 / 932
页数:8
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