A Flexible Capacitive Pressure Sensor Based on Ionic Liquid

被引：52

作者：

Yang, Xiaofeng ^{[1
]}

Wang, Yishou ^{[1
]}

Qing, Xinlin ^{[1
]}

机构：

[1] Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China

来源：

SENSORS | 2018年 / 18卷 / 07期

基金：

中国国家自然科学基金;

关键词：

sensor; aerodynamic pressure; ionic liquid; electrical double layer; DOUBLE-LAYER; ELECTRONICS;

D O I：

10.3390/s18072395

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A flexible microfluidic super-capacitive pressure sensor is developed to measure the surface pressure of a complex structure. The innovative sensor contains a filter paper filled with ionic liquid, and coated with two indium tin oxide polyethylene terephthalate (ITO-PET) films on the top and bottom, respectively. When external pressure is applied on the top ITO-PET film of the sensor mounted on the surface of an aircraft, the capacitance between the two ITO-PET films will change because of the deformation of the top ITO-PET film. The external pressure will be determined based on the change of the capacitance. Compared to the traditional pressure sensor, the developed sensor provides a high sensitivity of up to 178.5 nF/KPa and rapid dynamic responses for pressure measurement. Meanwhile, experiments are also conducted to study the influence of the thickness of the sensing film, sensing area, temperature, and humidity.

引用

页数：10

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