On-chip temperature compensation in an integrated slot-waveguide ring resonator refractive index sensor array

被引：98

作者：

Gylfason, Kristinn B. ^{[1
]}

Carlborg, Carl Fredrik ^{[1
]}

Kazmierczak, Andrzej ^{[2
]}

Dortu, Fabian ^{[2
]}

Sohlstrom, Hans ^{[1
]}

Vivien, Laurent ^{[3
]}

Barrios, Carlos A. ^{[4
]}

van der Wijngaart, Wouter ^{[1
]}

Stemme, Goran ^{[1
]}

机构：

[1] Royal Inst Technol, Sch Elect Engn, Microsyst Technol Lab, KTH, SE-10044 Stockholm, Sweden

[2] Multitel Asbl, Appl Photon Dept, B-7000 Mons, Belgium

[3] Univ Paris 11, CNRS, UMR 8622, Inst Elect Fondamentale, F-91405 Orsay, France

[4] Univ Politecn Madrid, ETSI Telecomunicac, ISOM, ES-28040 Madrid, Spain

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 04期

关键词：

D O I：

10.1364/OE.18.003226

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present an experimental study of an integrated slot-waveguide refractive index sensor array fabricated in silicon nitride on silica. We study the temperature dependence of the slot-waveguide ring resonator sensors and find that they show a low temperature dependence of -16.6 pm/K, while at the same time a large refractive index sensitivity of 240 nm per refractive index unit. Furthermore, by using on-chip temperature referencing, a differential temperature sensitivity of only 0.3 pm/K is obtained, without individual sensor calibration. This low value indicates good sensor-to-sensor repeatability, thus enabling use in highly parallel chemical assays. We demonstrate refractive index measurements during temperature drift and show a detection limit of 8.8 x 10(-6) refractive index units in a 7 K temperature operating window, without external temperature control. Finally, we suggest the possibility of athermal slot-waveguide sensor design. (C) 2010 Optical Society of America

引用

页码：3226 / 3237

页数：12

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