Electrical properties of multicrystalline silicon produced by electromagnetic casting process:: Degradation and improvement

The electrical properties of boron-doped multicrystalline silicon for photovoltaic applications, elaborated by the cold crucible pulling process, are studied by the photoconductivity decay method and the electron beam-induced current measurement technique. The bulk lifetime mapping of the minority carriers in the as-grown silicon wafers is drawn up using both the techniques. Moreover, the consequence of phosphorus doping on the recombination properties of extended defects are studied using the EBIC measurements. Two different treatments are investigated in order to improve the electrical properties of the as-grown silicon wafers: (a) thermal phosphorus diffusion, for which the gettering efficiency is determined by the different treatment parameters; (b) remote plasma hydrogen passivation which leads to increase of the minority carrier lifetime. (C) 2001 Published by Elsevier Science B.V. All rights reserved.