Strain mechanism of LiNbO3/sapphire heterostructures grown by pulsed laser deposition

被引:2
作者
Shibata, Y [1 ]
Kuze, N
Matsui, M
Kanai, M
Kawai, TJ
机构
[1] Asahi Chem Ind Co Ltd, Cent Res Labs, Shizuoka 416, Japan
[2] Osaka Univ, Inst Sci & Ind Res, Osaka 567, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 12A期
关键词
LiNbO3; sapphire; epitaxial thin film; strain; thermal expansion coefficients; pulsed laser deposition;
D O I
10.1143/JJAP.36.7344
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin LiNbO3 films are deposited on (001) sapphire substrates by a pulsed laser deposition technique. The epitaxial growth of the films is confirmed by high-resolution X-ray diffraction action (HRXRD) and high-resolution transmission electron microscopy (TER I) analyses. The lattice parameters and thermal expansion coefficients of the films are determined by an XRD technique. The deposited films are strained at room temperature; that is, the a-axis is longer and the c-axis is shorter than those of LiNbO3 single crystals. On the contrary, the films are not strained at the deposition temperature of 735 degrees C, The strain of the films is caused by the large differences in the thermal expansion coefficients between LiNbO3 and sapphire substrates.
引用
收藏
页码:7344 / 7347
页数:4
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