Modeling an optical micromachine probe

被引：1

作者：

Mittas, A ^{[1
]}

Dickey, FM ^{[1
]}

Holswade, SC ^{[1
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

ULTRAHIGH- AND HIGH-SPEED PHOTOGRAPHY AND IMAGE-BASED MOTION MEASUREMENT | 1997年 / 3173卷

关键词：

micromachines; optical probe; performance analysis; optical modeling;

D O I：

10.1117/12.294528

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Silicon micromachines are fabricated using Surface Micro-Machining (SMM) techniques. Silicon micromachines include engines that consist of orthogonally oriented linear comb drive actuators mechanically connected to a rotating gear. These gears are as small as 50-mu m in diameter and can be driven at rotation rates exceeding 300,000-rpm. Measuring and analyzing microengine performance is basic to micromachine development and system applications. Optical techniques offer the potential for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. We describe the modeling of an optical probe developed at Sandia National Laboratories. Experimental data will be compared with output from the model.

引用

页码：345 / 356

页数：12