Copper oxide thin films for ethanol sensing

被引：10
|
作者：
Zeggar, M. Lamri [1 ]
Bourfaa, F. [1 ]
Adjimi, A. [1 ]
Aida, M. S. [1 ]
Attaf, N. [1 ]
机构：
[1] Univ Constantine 1, Fac Sci, Lab Thin Films & Interfaces, Algiers, Algeria
来源：
5TH INTERNATIONAL CONFERENCE ON MATERIALS AND APPLICATIONS FOR SENSORS AND TRANSDUCERS (IC-MAST2015) | 2016年 / 108卷
关键词：
SENSORS;
D O I：
10.1088/1757-899X/108/1/012004
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The present is a study of a new active layer for ethanol (C2H5OH) vapour sensing devices based on copper oxide (CuO). CuO films were prepared by spray ultrasonic pyrolysis at a substrate temperature of 350 degrees C. Films microstructure was examined by X-ray diffraction and atomic force microscopy. Vapour-sensing testing was conducted using static vapour-sensing system, at different operating temperatures in the range of 100 degrees C to 175 degrees C for the vapour concentration of 300 ppm. The results show a high response of 45% at relatively low operating temperatures of 150 degrees C towards ethanol vapour.
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页数：5
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