Structural investigation of thin TiO2 films prepared by evaporation and post-heating

被引：22

作者：

Jerrnan, Martin ^{[1
]}

Mergel, Dieter ^{[1
]}

机构：

[1] Univ Duisburg Essen, Opt Workshop, Thin Film Technol Grp, FB 7,Dept Phys, D-45117 Duisburg, Germany

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 17期

关键词：

titanium oxide; evaporation; optical coatings; crystallization;

D O I：

10.1016/j.tsf.2007.01.038

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of TiO2 have been prepared by reactive evaporation of Ti2O3 at substrate temperatures from 150 degrees C to 350 degrees C and by post-heating at 150 degrees C to 850 degrees C. The mass density of the films increases with increasing substrate and annealing temperature. The crystalline structure of the film prepared at 350 OC is anatase and becomes rutile upon annealing at 850 degrees C. All other films are amorphous as-prepared and become anatase upon annealing above 250 degrees C. The crystallinity is higher for films prepared at lower temperature and does not increase with annealing temperature. Coatings with reproducible optical properties are obtained when deposited and post-annealed at 250 degrees C. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：6904 / 6908

页数：5

共 17 条

[1] Repeatability of the composition of titanium oxide films produced by evaporation of Ti2O3 [J].