Tuning Electrical and Thermal Transport in AlGaN/GaN Heterostructures via Buffer Layer Engineering

被引:27
作者
Yalamarthy, Ananth Saran [1 ]
So, Hongyun [2 ]
Rojo, Miguel Munoz [3 ]
Suria, Ateeq J. [1 ]
Xu, Xiaoqing [4 ]
Pop, Eric [3 ,5 ,6 ]
Senesky, Debbie G. [3 ,6 ,7 ]
机构
[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
[2] Hanyang Univ, Dept Mech Engn, Seoul 04763, South Korea
[3] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[4] Stanford Univ, Stanford Nanofabricat Facil, Stanford, CA 94305 USA
[5] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[6] Stanford Univ, Precourt Inst Energy, Stanford, CA 94305 USA
[7] Stanford Univ, Dept Aeronaut & Astronaut, Stanford, CA 94305 USA
基金
美国国家科学基金会;
关键词
2DEG; AlGaN/GaN; polarization; Seebeck coefficients; thermal conductivity; PIEZOELECTRIC POLARIZATION; GAS;
D O I
10.1002/adfm.201705823
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Progress in wide bandgap, III-V material systems based on gallium nitride (GaN) has enabled the realization of high-power and high-frequency electronics. Since the highly conductive, 2D electron gas (2DEG) at the aluminum gallium nitride (AlGaN)/GaN interface is based on built-in polarization fields and is confined to nanoscale thicknesses, its charge carriers exhibit much higher mobilities compared to their doped counterparts. This study shows that such 2DEGs also offer the unique ability to manipulate electrical transport separately from thermal transport, through the examination of fully suspended AlGaN/GaN diaphragms of varied GaN buffer layer thickness. Notably, approximate to 100 nm thin GaN layers can considerably impede heat flow without electrical transport degradation. These achieve 4x improvement in the thermoelectric figure of merit (zT) over externally doped GaN, with state-of-the-art power factors of 4-7 mW m(-1) K-2. The remarkable tuning behavior and thermoelectric enhancement, elucidated here for the first time in a polarization-based heterostructure, are achieved because electrons are at the heterostructured interface, while phonons are within the material system. These results highlight the potential for using 2DEGs in III-V materials for on-chip thermal sensing and energy harvesting.
引用
收藏
页数:9
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