Design aspects of a large scale turbomolecular pump with active magnetic bearings

被引：23

作者：

Han, Bangcheng ^{[1
]}

Huang, Ziyuan ^{[1
]}

Le, Yun ^{[1
]}

机构：

[1] Beihang Univ, 37 XueYuan Rd, Beijing 100191, Peoples R China

来源：

VACUUM | 2017年 / 142卷

关键词：

Turbomolecular pump; Brushless DC motor; Active magnetic bearing; High-speed applications; SYSTEM; ROTOR; MOTOR;

D O I：

10.1016/j.vacuum.2016.12.010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A large scale 5-axis magnetically levitated turbomolecular pump is designed and fabricated in this paper. The rotor is supported by two radial active magnetic bearings (AMBs) and an axial AMB, and driven by a high-speed brushless DC Motor with a ring permanent magnet. The considerations discussed are described by design of an actual magnetic levitation turbomolecular pump with rated high-speed vacuum pumping speed of 4100L/s and ultra-high vacuum of the order of 1.8 x 10(-7)Pa. The vacuum, stress, modal, and electromagnetic aspects are put equal weight in the design of a large scale turbomolecular pump supported by AMBs. The thermal assembly technology of the ring PM, sleeve, and shaft for the turbo rotor is proposed. Finally, the suggested design methodology for designing a large scale turbo molecular pump with AMBs is presented. (C) 2017 Elsevier Ltd. All rights reserved.

引用

页码：96 / 105

页数：10

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