A ZnO nanowire-based humidity sensor

被引：128

作者：

Chang, Sheng-Po ^{[1
,2
]}

Chang, Shoou-Jinn ^{[1
,2
]}

Lu, Chien-Yuan ^{[1
,2
]}

Li, Meng-Ju ^{[3
]}

Hsu, Cheng-Liang ^{[3
]}

Chiou, Yu-Zung ^{[4
]}

Hsueh, Ting-Jen ^{[5
]}

Chen, I-Cherng ^{[6
]}

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 70101, Taiwan

[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 70101, Taiwan

[3] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[4] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan

[5] Natl Nano Device Labs, Tainan 74147, Taiwan

[6] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2010年 / 47卷 / 06期

关键词：

ZnO nanowire; Moisture sensor; Relative humidity; One-dimensional; Humidity; GAS SENSORS; ROOM-TEMPERATURE; COMPOSITE; TIO2;

D O I：

10.1016/j.spmi.2010.03.006

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80 degrees C, it was found that measured resistances were 5.9 x 10(5), 4.3 x 10(5), 3.7 x 10(5) and 3.2 x 10(5) Omega when measured with 25%, 50%, 70% and 90% relative humidity, respectively. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：772 / 778

页数：7

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