A ZnO nanowire-based humidity sensor

被引：127

作者：

Chang, Sheng-Po ^{[1
,2
]}

Chang, Shoou-Jinn ^{[1
,2
]}

Lu, Chien-Yuan ^{[1
,2
]}

Li, Meng-Ju ^{[3
]}

Hsu, Cheng-Liang ^{[3
]}

Chiou, Yu-Zung ^{[4
]}

Hsueh, Ting-Jen ^{[5
]}

Chen, I-Cherng ^{[6
]}

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 70101, Taiwan

[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 70101, Taiwan

[3] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[4] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan

[5] Natl Nano Device Labs, Tainan 74147, Taiwan

[6] Ind Technol Res Inst S, Micro Syst Technol Ctr, Tainan 709, Taiwan

来源：

SUPERLATTICES AND MICROSTRUCTURES | 2010年 / 47卷 / 06期

关键词：

ZnO nanowire; Moisture sensor; Relative humidity; One-dimensional; Humidity; GAS SENSORS; ROOM-TEMPERATURE; COMPOSITE; TIO2;

D O I：

10.1016/j.spmi.2010.03.006

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80 degrees C, it was found that measured resistances were 5.9 x 10(5), 4.3 x 10(5), 3.7 x 10(5) and 3.2 x 10(5) Omega when measured with 25%, 50%, 70% and 90% relative humidity, respectively. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：772 / 778

页数：7

共 29 条

[1] Fundamental and practical aspects in the design of nanoscaled SnO2 gas sensors:: a status report [J].

Barsan, N ;

Schweizer-Berberich, M ;

Göpel, W .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1999, 365 (04) :287-304

[2] Highly sensitive ZnO nanowire CO sensors with the adsorption of Au nanoparticles [J].

Chang, Shoou-Jinn ;

Hsueh, Ting-Jen ;

Chen, I-Cherng ;

Huang, Bohr-Ran .

NANOTECHNOLOGY, 2008, 19 (17)

[3] A ZnO nanowire vacuum pressure sensor [J].

Chang, Shoou-Jinn ;

Hsueh, Ting-Jen ;

Hsu, Cheng-Liang ;

Lin, Yan-Ru ;

Chen, I-Cherng ;

Huang, Bohr-Ran .

NANOTECHNOLOGY, 2008, 19 (09)

[4] MEMS-based humidity sensor with integrated temperature compensation mechanism [J].

Chen, Lung-Tai ;

Lee, Chia-Yen ;

Cheng, Wood-Hi .

SENSORS AND ACTUATORS A-PHYSICAL, 2008, 147 (02) :522-528

[5] Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts [J].

Comini, E ;

Faglia, G ;

Sberveglieri, G ;

Pan, ZW ;

Wang, ZL .

APPLIED PHYSICS LETTERS, 2002, 81 (10) :1869-1871

[6] Two-dimensional dendritic ZnO nanowires from oxidation of Zn microcrystals [J].

Fan, HJ ;

Scholz, R ;

Kolb, FM ;

Zacharias, M .

APPLIED PHYSICS LETTERS, 2004, 85 (18) :4142-4144

[7] Bridged ZnO nanowires across trenched electrodes [J].

Gao, Pu-Xian ;

Liu, Jin ;

Buchine, Brent A. ;

Weintraub, Benjamin ;

Wang, Z. L. ;

Lee, J. L. .

APPLIED PHYSICS LETTERS, 2007, 91 (14)

[8] Indium-diffused ZnO nanowires synthesized on ITO-buffered Si substrate [J].

Hsu, CL ;

Chang, SJ ;

Lin, YR ;

Wu, JM ;

Lin, TS ;

Tsai, SY ;

Chen, IC .

NANOTECHNOLOGY, 2006, 17 (02) :516-519

[9] ZnO nanotube ethanol gas sensors [J].

Hsueh, Ting-Jen ;

Chang, Shoou-Jin ;

Hsu, Cheng-Liang ;

Lin, Yan-Ru ;

Chen, I. -Cherng .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (09) :K152-K155

[10] Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption [J].

Hsueh, Ting-Jen ;

Chang, Shoou-Jinn ;

Hsu, Cheng-Liang ;

Lin, Yan-Ru ;

Chen, I.-Cherng .

APPLIED PHYSICS LETTERS, 2007, 91 (05)

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