Stress-induced martensite in NiTi corrugated films

被引:0
作者
Wuttig, M [1 ]
Slutsker, JS [1 ]
Mori, K [1 ]
Li, J [1 ]
机构
[1] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
来源
MATERIALS OF SMART SYSTEMS III | 2000年 / 604卷
关键词
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Films deposited on corrugated surfaces develop non-uniform stresses when cooled from the deposition temperature. A disclination model shows that the stresses have rhombohedral and tetragonal components which can preferentially stress induce the martensite variants. The deflection of NiTi/Si bimorphs caused by the formation of martensite should thus be different if the NiTi/Si interface is corrugated or not. Experimental results confirm this expectation.
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页码:105 / 108
页数:4
相关论文
共 18 条
  • [1] COMPOSITION AND STRUCTURE OF THE NATIVE SI OXIDE BY HIGH DEPTH RESOLUTION MEDIUM ENERGY ION-SCATTERING
    ALBAYATI, AH
    ORRMANROSSITER, KG
    VANDENBERG, JA
    ARMOUR, DG
    [J]. SURFACE SCIENCE, 1991, 241 (1-2) : 91 - 102
  • [2] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON
    FINNE, RM
    KLEIN, DL
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 965 - &
  • [3] HOU L, 1995, MATER RES SOC SYMP P, V360, P369
  • [4] HUA ZS, 1993, P S DAMP MULT IN MAT, P159
  • [5] Mixed-sputter deposition of Ni-Ti-Cu shape memory films
    Krulevitch, P
    Ramsey, PB
    Makowiecki, DM
    Lee, AP
    Northrup, MA
    Johnson, GC
    [J]. THIN SOLID FILMS, 1996, 274 (1-2) : 101 - 105
  • [6] MIYAZAKI S, 1995, J PHYS IV, V5, P665
  • [7] Micromachined silicon torsional resonator for magnetic anisotropy measurement
    Morillo, J
    Su, QM
    Panchapakesan, B
    Wuttig, M
    Novotny, D
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (11) : 3908 - 3912
  • [8] NAKAMURA N, 1992, JPN J APPL PHYS, V31, P2775
  • [9] POMPE W, 1996, J APPL PHYS, V79, P4037
  • [10] QUANDT E, 1995, SENSOR ACTUAT A-PHYS, V53, P433