Wafer-Scale LSPR Substrate: Oblique Deposition of Gold on a Patterned Sapphire Substrate

被引:6
作者
Kim, Kihyeun [1 ]
Lee, Ki Joong [2 ]
Jo, Na Rae [2 ]
Jo, Eun-Jung [3 ]
Shin, Yong-Beom [2 ,4 ]
Kim, Min-Gon [3 ]
机构
[1] Massachusetts Gen Hosp, Ctr Syst Biol, Boston, MA 02114 USA
[2] Korea Res Inst Biosci & Biotechnol KRIBB, Bionanotechnol Res Ctr, 125 Gwahak Ro, Daejeon 34141, South Korea
[3] Gwangju Inst Sci & Technol GIST, Dept Chem, Gwangju 61005, South Korea
[4] BioNano Hlth Guard Res Ctr, 125 Gwahak Ro, Daejeon 34141, South Korea
来源
BIOSENSORS-BASEL | 2022年 / 12卷 / 03期
基金
新加坡国家研究基金会;
关键词
patterned sapphire substrate; localized surface plasmon resonance; oblique deposition; nanoimprint lithography; wafer-scale; SHAPE CONTROL; FABRICATION;
D O I
10.3390/bios12030158
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Label-free detection of biomolecules using localized surface plasmon resonance (LSPR) substrates is a highly attractive method for point-of-care (POC) testing. One of the remaining challenges to developing LSPR-based POC devices is to fabricate the LSPR substrates with large-scale, reproducible, and high-throughput. Herein, a fabrication strategy for wafer-scale LSPR substrates is demonstrated using reproducible, high-throughput techniques, such as nanoimprint lithography, wet-etching, and thin film deposition. A transparent sapphire wafer, on which SiO2-nanodot hard masks were formed via nanoimprint lithography, was anisotropically etched by a mixed solution of H2SO4 and H3PO4, resulting in a patterned sapphire substrate (PSS). An LSPR substrate was finally fabricated by oblique deposition of Au onto the PSS, which was then applied to label-free detection of the binding events of biomolecules. To the best of our knowledge, this paper is the first report on the application of the PSS used as an LSPR template by obliquely depositing a metal.
引用
收藏
页数:7
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