Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

被引:12
|
作者
Ohba, Tomihito [1 ]
Makabe, Toshiaki [1 ]
机构
[1] Keio Univ, Dept Elect & Elect Engn, Fac Sci & Technol, Yokohama, Kanagawa 2238522, Japan
关键词
argon; computerised tomography; plasma collision processes; plasma density; plasma diagnostics; TOMOGRAPHY;
D O I
10.1063/1.3360888
中图分类号
O59 [应用物理学];
学科分类号
摘要
When a pair of short- and long-lived excited molecules are coupled with an upper radiative state, it will be possible to derive the number density of the long-lived species from the optical emission spectroscopy of upper-level short-lived species by careful selection of the pair. Two-dimensional density distributions of the long-lived metastable state Ar(1s(5)) and that of the short-lived excited state Ar(2p(2)) are observed and compared in the time-averaged form, using a computerized tomography technique of the emissions from a pair of optical transitions in a two-frequency capacitively coupled plasma in pure Ar.
引用
收藏
页数:3
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