Bowing effect in elastic constants of dilute Ga(As,N) alloys

被引:3
作者
Berggren, Jonas [1 ]
Hanke, Michael [1 ]
Trampert, Achim [1 ]
机构
[1] Paul Drude Inst Festkorperelekt, Hausvogteipl 5-7, D-10117 Berlin, Germany
关键词
THIN-FILMS; NANOINDENTATION;
D O I
10.1063/1.4948935
中图分类号
O59 [应用物理学];
学科分类号
摘要
We study the elastic properties of dilute Ga(As,N) thin films grown on GaAs(001) by means of nano-indentation and complementary dynamic finite element calculations. The experimental results of indentation modulus are compared with simulations in order to extract the cubic elastic constants c(ij) as a function of nitrogen content of the Ga(As,N) alloys. Both, indentation modulus and elastic constants decrease with increasing nitrogen content, which proves a strong negative bowing effect in this system in contrast to Vegard's law. Published by AIP Publishing.
引用
收藏
页数:4
相关论文
共 16 条
[1]   GAAS, ALAS, AND ALXGA1-XAS - MATERIAL PARAMETERS FOR USE IN RESEARCH AND DEVICE APPLICATIONS [J].
ADACHI, S .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) :R1-R29
[2]   Properties of Chemical Beam Epitaxy grown GaAs0.995N0.005 homo-junction solar cell [J].
Bouzazi, Boussairi ;
Nishimura, Kenichi ;
Suzuki, Hidetoshi ;
Kojima, Nobuaki ;
Ohshita, Yoshio ;
Yamaguchi, Masafumi .
CURRENT APPLIED PHYSICS, 2010, 10 :S188-S190
[3]   Nanoindentation on AlGaN thin films [J].
Cáceres, D ;
Vergara, I ;
González, R ;
Monroy, E ;
Calle, F ;
Muñoz, E ;
Omnès, F .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (12) :6773-6778
[4]   A method for interpreting the data from depth-sensing indentation instruments [J].
Doerner, M. F. ;
Nix, W. D. .
JOURNAL OF MATERIALS RESEARCH, 1986, 1 (04) :601-609
[5]   Review of analysis and interpretation of nanoindentation test data [J].
Fischer-Cripps, AC .
SURFACE & COATINGS TECHNOLOGY, 2006, 200 (14-15) :4153-4165
[6]   GaInNAs long-wavelength lasers: progress and challenges [J].
Harris, JS .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2002, 17 (08) :880-891
[7]   Critical parameters for the molecular beam epitaxial growth of 1.55 μm (Ga,In)(N,As) multiple quantum wells [J].
Ishikawa, Fumitaro ;
Luna, Esperanza ;
Trampert, Achim ;
Ploog, Klaus H. .
APPLIED PHYSICS LETTERS, 2006, 89 (18)
[8]   Elastic and plastic properties of InxGa1-xAs [J].
Korte, S. ;
Farrer, I. ;
Clegg, W. J. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (20)
[9]   AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].
OLIVER, WC ;
PHARR, GM .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583
[10]   Mechanical Properties of Cubic SiC, GaN and AlN Thin Films [J].
Pezoldt, Joerg ;
Grieseler, Rolf ;
Schupp, Thorsten ;
As, Donat J. ;
Schaaf, Peter .
SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2, 2012, 717-720 :513-+