Full-Self-Powered Humidity Sensor Based on Electrochemical Aluminum-Water Reaction

被引：7

作者：

Boskovic, Marko, V ^{[1
]}

Sljukic, Biljana ^{[2
,3
]}

Radovic, Dana Vasiljevic ^{[1
]}

Radulovic, Katarina ^{[1
]}

Rafajilovic, Milena Rasljic ^{[1
]}

Frantlovic, Milog ^{[1
]}

Sarajlic, Milija ^{[1
]}

机构：

[1] Univ Belgrade, Inst Chem Technol & Met, Dept Microelect Technol, Njegoseva 12, Belgrade 11000, Serbia

[2] Univ Belgrade, Fac Phys Chem, Studentski Trg 12-16, Belgrade 11158, Serbia

[3] Univ Lisbon, Inst Super Techn, CeFEMA, P-1049001 Lisbon, Portugal

来源：

SENSORS | 2021年 / 21卷 / 10期

关键词：

full-self-powered; breath monitoring; energy harvesting; humidity sensing; interdigitated capacitor; aluminum-air reaction; PERFORMANCE; SYSTEMS;

D O I：

10.3390/s21103486

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A detailed examination of the principle of operation behind the functioning of the full-self-powered humidity sensor is presented. The sensor has been realized as a structure consisting of an interdigitated capacitor with aluminum thin-film digits. In this work, the details of its fabrication and activation are described in detail. The performed XRD, FTIR, SEM, AFM, and EIS analyses, as well as noise measurements, revealed that the dominant process of electricity generation is the electrochemical reaction between the sensor's aluminum electrodes and the water from humid air in the presence of oxygen, which was the main goal of this work. The response of the sensor to human breath is also presented as a demonstration of its possible practical application.

引用

页数：13

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