Optimal design of a flexure-hinge precision stage

被引:10
作者
Hwang, Eun Joo [1 ]
Min, Kyung Suk [1 ]
Song, Shin Hyung [1 ]
Ahn, Il Hyuk [1 ]
Choi, Woo Chun [1 ]
机构
[1] Korea Univ, Grad Sch, Dept Mech Engn, Seoul 136701, South Korea
关键词
stage; flexure hinge; lever; magnification ratio; output displacement to input force; travel range; design parameter; spring rate; neck thickness;
D O I
10.1007/BF03026966
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Lever mechanisms are usually used to enlarge output displacements in precision stages. A precision stage employing a lever mechanism and flexure hinges is analyzed theoretically, with bending in the lever considered. Relations between design parameters and magnification ratio, and the optimal values for the parameters to achieve a longer stage displacement are presented. Finite element analysis is used to verify the theoretical analysis. It is found that adjustment of lever dimensions and hinge stiffnesses can increase the stage travel range significantly.
引用
收藏
页码:616 / 623
页数:8
相关论文
共 10 条
[1]  
CALLISTER JRW, 2000, MAT SCI ENG INTRO, P798
[2]   A precision piezodriven micropositioner mechanism with large travel range [J].
Chang, SH ;
Du, BC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (04) :1785-1791
[3]   Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism [J].
Culpepper, ML ;
Anderson, G .
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2004, 28 (04) :469-482
[4]  
ESEYTLIN YM, 2002, REV SCI INSTRUM SEP, V73, P3363
[5]  
FURUKAWA E, 1994, INT J JPN S PREC ENG, V28, P70
[6]  
Paros J M., 1965, Mach. Des, V37, P151
[7]   Optimal design of a flexure hinge based XYθ wafer stage [J].
Ryu, JW ;
Gweon, DG ;
Moon, KS .
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1997, 21 (01) :18-28
[8]  
SMITH ST, FLEXURES ELEMENTS EL, P346
[9]   Design calculations for flexure hinges [J].
Wu, YF ;
Zhou, ZY .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (08) :3101-3106
[10]  
XU W, 1995, MECH AMPLIFIER DESIG