Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry

被引：30

作者：

Li, Weiqi ^{[1
]}

Zhang, Chuanwei ^{[1
,2
]}

Jiang, Hao ^{[1
]}

Chen, Xiuguo ^{[1
]}

Liu, Shiyuan ^{[1
,2
]}

机构：

[1] Huazhong Univ Sci & Technol, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[2] Wuhan Eopt Technol Co Ltd, Wuhan 430075, Peoples R China

来源：

JOURNAL OF OPTICS | 2016年 / 18卷 / 05期

基金：

中国国家自然科学基金;

关键词：

depolarization; dual rotating-compensator; Mueller matrix ellipsometry; finite bandwidth; correction; measurement accuracy; CALIBRATION; POLARIMETRY; ERRORS;

D O I：

10.1088/2040-8978/18/5/055701

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Noticeable depolarization effects are observed in the measurement of the air using an in-house developed dual rotating-compensator Mueller matrix ellipsometer. We demonstrate that these depolarization effects are essentially artifacts and mainly induced when the compensator with wavelength-dependent optical properties is integrated with the finite bandwidth detector. We define a general formula to represent the actual Mueller matrix of the compensator by taking into account the depolarization artifacts. After incorporating this formula into the system model, a correction method is further proposed, and consequently, improved accuracy can be achieved in the Mueller matrix measurement.

引用

页数：7

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