A High-Sensitive Pressure Sensor Using a Single-Mode Fiber Embedded Microbubble with Thin Film Characteristics

被引：14

作者：

Wang, Guanjun ^{[1
,2
,3
]}

Liu, Xinglin ^{[2
,3
]}

Gui, Zhiguo ^{[2
]}

An, Yongquan ^{[2
,3
]}

Gu, Jinyu ^{[2
,3
]}

Zhang, Meiqin ^{[2
,3
]}

Yan, Lu ^{[2
,3
]}

Wang, Gao ^{[2
]}

Wang, Zhibin ^{[2
,3
]}

机构：

[1] Shenzhen Univ, Coll Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China

[2] North Univ China, Sch Informat & Commun Engn, Taiyuan 030051, Peoples R China

[3] Engn Technol Res Ctr Shanxi Prov Optoelect Inform, Taiyuan 030051, Peoples R China

来源：

SENSORS | 2017年 / 17卷 / 06期

关键词：

pressure sensing; Fabry-Perot interference; microbubble; thin film layer; FABRY-PEROT-INTERFEROMETER; TEMPERATURE; CAVITY;

D O I：

10.3390/s17061192

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A new fiber pressure sensor is proposed and analyzed in this paper. A commercial arc fusion splicer and pressure-assisted arc discharge technology are used here to fabricate a silica hollow microbubble from a common glass tube with the characteristics of a thin film. Then the single mode fiber is embedded into the microbubble to form a fiber Fabry-Perot interferometer by measuring the reflected interference spectrum from the fiber tip and microbubble end. As the wall thickness of the micro-bubble can reach up to several micrometers, it can then be used for measuring the outer pressure with high sensitivity. The fabrication method has the merits of being simple, low in cost, and is easy to control. Experimental results show that its pressure sensitivity can reach 164.56 pm/kPa and the temperature sensitivity can reach 4 pm/degrees C. Therefore, it also has the advantage of being insensitive to temperature fluctuation.

引用

页数：10

共 16 条

[1]

Chen Genxiang, 2000, LIGHT TECHNOLOGY BAS

[2] 2-D optical/opto-mechanical microfluidic sensing with micro-bubble resonators [J].

Chen, Zhenmin ;

Li, Ming ;

Wu, Xiang ;

Liu, Liying ;

Xu, Lei .

OPTICS EXPRESS, 2015, 23 (14) :17659-17664

[3] Optical fiber sensor technologies: Opportunities and-perhaps-pitfalls [J].

Culshaw, B .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2004, 22 (01) :39-50

[4]

Duan D. W., 2011, ELECTRON LETT, V47, P1702

[5] Tuning whispering gallery modes using internal aerostatic pressure [J].

Henze, Rico ;

Seifert, Tom ;

Ward, Jonathan ;

Benson, Oliver .

OPTICS LETTERS, 2011, 36 (23) :4536-4538

[6] Low-Cost Fiber-Tip Fabry-Perot Interferometer and Its Application for Transverse Load Sensing [J].

Jiang, Xiaogang ;

Chen, Daru .

PROGRESS IN ELECTROMAGNETICS RESEARCH LETTERS, 2014, 48 :103-108

[7] Fiber grating sensors [J].

Kersey, AD ;

Davis, MA ;

Patrick, HJ ;

LeBlanc, M ;

Koo, KP ;

Askins, CG ;

Putnam, MA ;

Friebele, EJ .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (08) :1442-1463

[8]

Li Min, 2008, OPTICAL FIBER SENSOR

[9] Optical fiber Fabry-Perot interferometer cavity fabricated by femtosecond laser micromachining and fusion splicing for refractive index sensing [J].

Liao, C. R. ;

Hu, T. Y. ;

Wang, D. N. .

OPTICS EXPRESS, 2012, 20 (20) :22813-22818

[10] Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement [J].

Liao, Changrui ;

Liu, Shen ;

Xu, Lei ;

Wang, Chao ;

Wang, Yiping ;

Li, Zhengyong ;

Wang, Qiao ;

Wang, D. N. .

OPTICS LETTERS, 2014, 39 (10) :2827-2830

← 1 2 →