Micro-scale Electrostatic Attach-detach Device for Self-reconfigurable Modular Robotic System

被引：4

作者：

Misumi, Kei ^{[1
]}

Usami, Naoto ^{[2
]}

Higo, Akio ^{[3
]}

Ulliac, Gwenn ^{[4
]}

Piranda, Benoit ^{[5
]}

Bourgeois, Julien ^{[5
]}

Mita, Yoshio ^{[1
]}

机构：

[1] Univ Tokyo, Dept Elect Engn & Informat Syst, Grad Sch Engn, Tokyo, Japan

[2] Univ Tokyo, Grad Sch Engn, Dept Aeronaut & Astronaut, Tokyo, Japan

[3] Univ Tokyo, Grad Sch Engn, Syst Design Lab, Tokyo, Japan

[4] FEMTO ST, MN2S, Besancon, France

[5] Univ Franche Comte, Comp Sci Dept, Besancon, France

来源：

2020 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP) | 2020年

基金：

日本学术振兴会;

关键词：

Self-reconfigurable robots; electrostatic actuator; micro robot; programmable matter;

D O I：

10.1109/dtip51112.2020.9139129

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose a micro-scale electrostatic attach-detach actuator device as an enabling component of micro self-reconfigurable modular robotic system (SMR), or programmable matter. The system is composed of a number of identical tiny agents that can adhere each other to form arbitral shapes. The actuator is composed of Au electrodes sandwiched by Parylene-C flexible substrate films. The film is made planar, and the SMR agent is realized by wrapping the actuator film around a shell of a unit robot, made by precise 3-D printing. We have measured the adhesive strength to be 99.3 mu N at 50 V, that is sufficient to perform attach demonstration.

引用

页数：4