Double-layer thin-film sensor for measurement of rapid temperature changes in flowing gases

A sensor was developed for the measurement of quick changes in temperature of flowing gases at high velocities. The most important fact of the construction is the arrangement of two electrically isolated thin films of resistance material in kongruent maanders. The first film resistor measures the temperature of the flowing gas while the inner film is used for controlled electrical heating so that it's temperature becomes equal to that of the upper film. A thermal decoupling is reached for the upper film from the substrate, especially when the backplane is actively cooled.