New materials for micro-scale sensors and actuators An engineering review

被引：433

作者：

Wilson, Stephen A. ^{[1
]}

Jourdain, Renaud P. J.

Zhang, Qi

Dorey, Robert A.

Bowen, Chris R.

Willander, Magnus

Wahab, Qamar Ul

Willander, Magnus

Safaa, M. Al-hilli

Nur, Omer

Quandt, Eckhard

Johansson, Christer

Pagounis, Emmanouel

Kohl, Manfred

Matovic, Jovan

Samel, Bjorn

van der Wijngaart, Wouter

Jager, Edwin W. H.

Carlsson, Daniel

Djinovic, Zoran

Wegener, Michael

Moldovan, Carmen

Iosub, Rodica

Abad, Estefania

Wendlandt, Michael

Rusu, Cristina

Persson, Katrin

机构：

[1] Cranfield Univ, Dept Mat, Microsyst & Nanotechnol Grp, Cranfield MK43 0AL, Beds, England

[2] Univ Bath, Dept Mech Engn, Mat Res Ctr, Bath BA2 7AY, Avon, England

[3] Linkoping Univ, Dept Sci & Technol, SE-60174 Norrkoping, Sweden

[4] Linkoping Univ, Dept Phys Measurement Technol Biol & Chem, SE-58183 Linkoping, Sweden

[5] Gothenburg Univ, Dept Phys, SE-41296 Gothenburg, Sweden

[6] Univ Kiel, Fac Engn, Inst Sci Mat, D-24143 Kiel, Germany

[7] Imego AB, SE-41133 Gothenburg, Sweden

[8] Aalto Univ, Mat Sci Lab, Helsinki 02015, Finland

[9] Forschungszentrum Karlsruhe, IMT, D-76021 Karlsruhe, Germany

[10] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

[11] Royal Inst Technol KTH, Sch Elect Engn, Microsyst Technol Lab MST, S-10044 Stockholm, Sweden

[12] Micromuscle AB, SE-58330 Linkoping, Sweden

[13] IMT Bucharest, Natl Inst Res & Dev Microtechnol, Microstruct Bio Med Applicat Res Lab, Bucharest 077190, Romania

[14] Fundac Tekniker, Micro & Nanotechnol Dept, Eibar 20600, Guipuzcoa, Spain

[15] ETH, Dept Mech Engn, CH-8092 Zurich, Switzerland

[16] Fraunhofer Inst Appl Polymer Res, D-14476 Postdam Golm, Germany

来源：

MATERIALS SCIENCE & ENGINEERING R-REPORTS | 2007年 / 56卷 / 1-6期

基金：

英国工程与自然科学研究理事会;

关键词：

piezoelectric; magnetic; shape memory; polymer; microstructure; microtechrology;

D O I：

10.1016/j.mser.2007.03.001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：1 / 129

页数：129

共 862 条

[131]

CURTIS R, 1992, MAT RES S P, V276, P161

[132] Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems [J].

Damean, N ;

Parviz, BA ;

Lee, JN ;

Odom, T ;

Whitesides, GM .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (01) :29-34

[133]

DAMJANOVIC D, 1994, MAT SMART SYSTEMS, P429

[134] Elastic and electromechanical properties of polypropylene foam ferroelectrets -: art. no. 031910 [J].

Dansachmüller, M ;

Schwödiauer, R ;

Bauer-Gogonea, S ;

Bauer, S ;

Paajanen, M ;

Raukola, J .

APPLIED PHYSICS LETTERS, 2005, 86 (03) :1-3

[135] Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices [J].

Davies, S ;

Huang, TS ;

Gass, MH ;

Papworth, AJ ;

Joyce, TB ;

Chalker, PR .

APPLIED PHYSICS LETTERS, 2004, 84 (14) :2566-2568

[136] Pyroelectricity of PZT-based thick-films [J].

De Cicco, G ;

Morten, B ;

Dalmonego, D ;

Prudenziati, M .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) :409-415

[137] Passive mechanical properties of polypyrrole films: a continuum, poroelastic model [J].

Della Santa, A ;

Mazzoldi, A ;

Tonci, C ;

De Rossi, D .

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC MATERIALS SENSORS AND SYSTEMS, 1997, 5 (02) :101-109

[138]

DellaSanta A, 1997, SMART MATER STRUCT, V6, P23, DOI 10.1088/0964-1726/6/1/003

[139] Performance and work capacity of a polypyrrole conducting polymer linear actuator [J].

DellaSanta, A ;

DeRossi, D ;

Mazzoldi, A .

SYNTHETIC METALS, 1997, 90 (02) :93-100

[140] Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components [J].

Dellmann, L ;

Roth, S ;

Beuret, C ;

Paratte, L ;

Racine, GA ;

Lorenz, H ;

Despont, M ;

Renaud, P ;

Vettiger, P ;

de Rooij, NF .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 1998, 4 (03) :147-150

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