Dramatically enhanced mechanical properties of diamond-like carbon films on polymer substrate for flexible display devices via argon plasma pretreatment

被引：12

作者：

Lee, Jen-Ai ^{[1
]}

Lin, Chii-Ruey ^{[2
,3
]}

Pan, Po-Chuan ^{[4
]}

Liu, Chi-Wen ^{[5
]}

Sun, Albert Yin Tung ^{[5
]}

机构：

[1] Taipei Med Univ, Sch Pharm, Taipei 11031, Taiwan

[2] Minghsin Univ Sci & Technol, Dept Mech Engn, Hsinchu 30401, Taiwan

[3] Minghsin Univ Sci & Technol, Inst Precis Mechctron Engn, Hsinchu 30401, Taiwan

[4] Natl Taipei Univ Technol, Coll Mech & Elect Engn, Taipei 10608, Taiwan

[5] Natl Taipei Univ Technol, Grad Inst Mfg Technol, Taipei 10608, Taiwan

来源：

CHEMICAL PHYSICS | 2020年 / 529卷

关键词：

Diamond-like carbon film; Radio frequency unbalanced magnetron; sputtering; Flexible substrate; Pencil hardness; BARRIER; FABRICATION; DEPOSITION; COATINGS; SURFACE; STEEL;

D O I：

10.1016/j.chemphys.2019.110551

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Hydrogen-free diamond-like carbon (DLC) films have been deposited on polyimide (PI) substrate at room temperature using the sputtering with a novel nanodiamond target. Also, argon plasma pretreatment procedure for PI substrate was optimized to improve the adhesion and characteristics of the as-prepared DLC film. The deposited DLC film on the PI substrate pretreated with - 400 V of bias voltage was found to possess the highest sp(3) bonding fraction of 53%, the pencil hardness of 3H, and the optical transmittance of 82%, respectively. The research work demonstrates prosperous applications of DLC films in the protective coating for commercialized optoelectronic devices.

引用

页数：5

共 33 条

[1] DEPOSITION OF WIDE BAND GAP DLC FILMS USING RF PECVD AT VERY LOW POWER [J].