Mechanical characterization of ultra-thin fluorocarbon films deposited by RF magnetron sputtering

被引：40
|
作者：
Tang, GZ
Ma, XX
Sun, MR
Li, XD
机构：
[1] Univ S Carolina, Dept Mech Engn, Columbia, SC 29208 USA
[2] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
来源：
CARBON | 2005年 / 43卷 / 02期
基金：
美国国家科学基金会;
关键词：
carbon films; mechanical properties; surface properties;
D O I：
10.1016/j.carbon.2004.09.022
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Fluorocarbon films were deposited on silicon substrate by R.F. magnetron sputtering using a polytetrafluoroethylene (PTFE) target. Structure of the deposited films was studied by X-ray photoelectron spectroscopy (XPS). Hardness, elastic modulus and scratch resistance were measured using a nanoindenter with scratch capability. -CFx (x = 1, 2, 3) and C-C units were found in the deposited fluorocarbon films. The hardness and elastic modulus of the films are strongly dependent on the R.F. power and deposition pressure. The film hardness is in the range from 0.8GPa to 1.3GPa while the film elastic modulus is in the range from 8GPa to 18GPa. Harder films exhibit higher scratch resistance. Differences in nanoindentation behavior between the deposited fluorocarbon films, diamond-like carbon (DLC) films and PTFE were discussed. The fluorocarbon films should find more applications in the magnetic storage and micro/nanoelectromechanical systems. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码：345 / 350
页数：6
相关论文
共 50 条
  • [1] Nanoscale Characterization of Ultra-thin Tungsten Films Deposited by Radio-Frequency Magnetron Sputtering
    Martinek, Tomas
    Kudelka, Josef
    Navratil, Milan
    Kresalek, Vojtech
    Fejfar, Antonin
    Hyvl, Matej
    Sobota, Jaroslav
    2015 IEEE 15TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2015, : 510 - 513
  • [2] Characterization of organic polymer thin films deposited by rf magnetron sputtering
    Oya, Toshiyuki
    Kusano, Eiji
    VACUUM, 2008, 83 (03) : 564 - 568
  • [3] Optical characterization of ZnO thin films deposited by RF magnetron sputtering method
    TANG Ning
    Science in China(Series E:Technological Sciences), 2009, (08) : 2200 - 2203
  • [4] A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering
    Pat, Suat
    Ozen, Soner
    Senay, Volkan
    Aydogmus, Tuna
    Elmas, Saliha
    Korkmaz, Sadan
    Ekem, Naci
    Balbag, M. Zafer
    INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING, 2015, 9 (05) : 415 - 424
  • [5] Optical characterization of ZnO thin films deposited by RF magnetron sputtering method
    Tang Ning
    Wang JinLiang
    Xu HengXing
    Peng HongYong
    Fan Chao
    SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES, 2009, 52 (08): : 2200 - 2203
  • [6] Optical characterization of ZnO thin films deposited by RF magnetron sputtering method
    Ning Tang
    JinLiang Wang
    HengXing Xu
    HongYong Peng
    Chao Fan
    Science in China Series E: Technological Sciences, 2009, 52 : 2200 - 2203
  • [7] Preparation and UV Absorption Property of Hybrid Fluorocarbon/ZnO Thin Films Deposited by RF Magnetron Sputtering
    Zhang, Yuhui
    Ji, Quan
    Liu, Zengji
    SMART MATERIALS AND INTELLIGENT SYSTEMS, PTS 1 AND 2, 2011, 143-144 : 792 - 796
  • [8] Characterization of zirconia films deposited by rf magnetron sputtering
    Ben Amor, S
    Rogier, B
    Baud, G
    Jacquet, M
    Nardin, M
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 57 (01): : 28 - 39
  • [9] Deposition of fluorocarbon thin films on polypropylene substrate by rf magnetron sputtering
    Zhang, Yuhui
    Ji, Quan
    Chen, Wenfei
    MULTI-FUNCTIONAL MATERIALS AND STRUCTURES II, PTS 1 AND 2, 2009, 79-82 : 875 - +
  • [10] Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering
    Natrayan, L.
    Balaji, S.
    Bharathiraja, G.
    Kaliappan, S.
    Veeman, Dhinakaran
    Mammo, Wubishet Degife
    JOURNAL OF NANOMATERIALS, 2021, 2021
12345