GaN Technology for Power Electronic Applications: A Review

被引:329
作者
Flack, Tyler J. [1 ]
Pushpakaran, Bejoy N. [1 ]
Bayne, Stephen B. [1 ]
机构
[1] Texas Tech Univ, Dept Elect & Comp Engn, 1012 Boston Ave, Lubbock, TX 79409 USA
关键词
Gallium nitride (GaN); power electronics; power semiconductors; VERTICAL HFETS; DESIGN; GROWTH; LAYERS; EPITAXY;
D O I
10.1007/s11664-016-4435-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Power semiconductor devices based on silicon (Si) are quickly approaching their limits, set by fundamental material properties. In order to address these limitations, new materials for use in devices must be investigated. Wide bandgap materials, such as silicon carbide (SiC) and gallium nitride (GaN) have suitable properties for power electronic applications; however, fabrication of practical devices from these materials may be challenging. SiC technology has matured to point of commercialized devices, whereas GaN requires further research to realize full material potential. This review covers fundamental material properties of GaN as they relate to Si and SiC. This is followed by a discussion of the contemporary issues involved with bulk GaN substrates and their fabrication and a brief overview of how devices are fabricated, both on native GaN substrate material and non-native substrate material. An overview of current device structures, which are being analyzed for use in power switching applications, is then provided; both vertical and lateral device structures are considered. Finally, a brief discussion of prototypes currently employing GaN devices is given.
引用
收藏
页码:2673 / 2682
页数:10
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