Three-dimensional additive electron-beam lithography

被引：2
作者：
Koops, HWP [1 ]
Weber, M [1 ]
Schossler, C [1 ]
Kaja, A [1 ]
机构：
[1] DEUTSCHE TELEKOM AG,FORSCH & TECHNOL ZENTRUM,D-64295 DARMSTADT,GERMANY
来源：
METAL/NONMETAL MICROSYSTEMS: PHYSICS, TECHNOLOGY, AND APPLICATIONS | 1996年 / 2780卷
关键词：
three dimensional; additive lithography; electron-beam induced deposition; nanocrystalline tips; tip-array; supertip; field emission; micro-tube; photon crystal; nanostructures; coulomb blockade;
D O I：
10.1117/12.238195
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：388 / 395
页数：8
相关论文
共 50 条
[41]   Nanofabrication by electron beam lithography and its applications: A review [J].
Chen, Yifang .
MICROELECTRONIC ENGINEERING, 2015, 135 :57-72
[42]   Electron-beam induced deposition and autocatalytic decomposition of Co(CO)3NO [J].
Vollnhals, Florian ;
Drost, Martin ;
Tu, Fan ;
Carrasco, Esther ;
Spaeth, Andreas ;
Fink, Rainer H. ;
Steinrueck, Hans-Peter ;
Marbach, Hubertus .
BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2014, 5 :1175-1185
[43]   Three-Dimensional Nanoprinting via Scanning Probe Lithography-Delivered Layer-by-Layer Deposition [J].
Zhao, Jianli ;
Swartz, Logan A. ;
Lin, Wei-feng ;
Schlenoff, Philip S. ;
Frommer, Jane ;
Schlenoff, Joseph B. ;
Liu, Gang-yu .
ACS NANO, 2016, 10 (06) :5656-5662
[44]   Purified and Crystalline Three-Dimensional Electron-Beam-Induced Deposits: The Successful Case of Cobalt for High-Performance Magnetic Nanowires [J].
Pablo-Navarro, Javier ;
Magen, Cesar ;
Maria de Teresa, Jose .
ACS APPLIED NANO MATERIALS, 2018, 1 (01) :38-46
[45]   Three-dimensional nanoassembly of multi-walled carbon nanotubes through nanorobotic manipulations by using electron-beam-induced deposition [J].
Dong, LX ;
Arai, F ;
Fukuda, T .
PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY, 2001, :93-98
[46]   Electron motion three-dimensional confinement for microelectronic vacuum gauges with field emitters [J].
Nicolaescu, D ;
Kanemaru, S ;
Filip, V ;
Itoh, J .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (4A) :2165-2172
[47]   Electron Tomography: Three-Dimensional Imaging of Real Crystal Structures at Atomic Resolution [J].
Zhang, Bingsen ;
Su, Dang Sheng .
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2013, 52 (33) :8504-8506
[48]   Three-dimensional appearance of the lips muscles with three-dimensional isotropic MRI: in vivo study [J].
Olszewski, Raphael ;
Liu, Y. ;
Duprez, T. ;
Xu, T. M. ;
Reychler, H. .
INTERNATIONAL JOURNAL OF COMPUTER ASSISTED RADIOLOGY AND SURGERY, 2009, 4 (04) :349-352
[49]   Three-dimensional appearance of the lips muscles with three-dimensional isotropic MRI: in vivo study [J].
Raphael Olszewski ;
Y. Liu ;
T. Duprez ;
T. M. Xu ;
H. Reychler .
International Journal of Computer Assisted Radiology and Surgery, 2009, 4 :349-352
[50]   Analytical solution of three-dimensional two-layer composite beam with interlayer slips [J].
Cas, B. ;
Planinc, I. ;
Schnabl, S. .
ENGINEERING STRUCTURES, 2018, 173 :269-282
12345