Micro-/Nano- structuralized interfaces of conductive and transparent thin-film microelectrodes for biomedical application

被引:0
作者
Vavrinsky, Erik [1 ]
Flickyngerova, Sona [1 ]
Gaspierik, Pavol [1 ]
Skriniarova, Jaroslava [1 ]
Novotny, Ivan [1 ]
Stopjakova, Viera [1 ]
Viglaslcy, Radovan [1 ]
Tvarozek, Vladimir [1 ]
Sutta, Pavol [2 ]
机构
[1] Slovak Univ Technol Bratislava, Dept Microelect, Bratislava, Slovakia
[2] West Bohemia Univ, Dept Mat & Technol, New Technol Ctr, Plzen, Czech Republic
来源
2009 2ND INTERNATIONAL SYMPOSIUM ON APPLIED SCIENCES IN BIOMEDICAL AND COMMUNICATION TECHNOLOGIES (ISABEL 2009) | 2009年
关键词
ZnO:Al thin films; IDA microelectrodes; non-invasive biomedical monitoring; blood sedimentation; human cognitive processes; psycho-galvanic reflex;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Planar thin-film microelectrodes have been developed based on conductive and transparent thin films of ZnO:Al which are applicable in biomedicine as well as in the thin film solar cells. Nano-structuralization of their interfaces (surfaces) was carried out by the ion-sputter etching and by the photo-assisted electrodeless chemical etching. Interdigital array of microelectrodes was verified as a very useful tool for biomedical application: the monitoring of blood state or psychogalvanic reflex.
引用
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页码:175 / +
页数:3
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