A computational study of the piezoelectric response due to the material effect in periodic, single island thin films and the geometric effect in periodic, bi-island thin films

被引:0
|
作者
Liu, B. [1 ]
Bhattacharyya, A. [1 ]
机构
[1] Univ Arkansas, Dept Appl Sci, 2801 S Univ,ETAS 575, Little Rock, AR 72204 USA
基金
美国国家科学基金会;
关键词
Piezoelectric effect; Stress; Periodic structure; Thin films;
D O I
10.1016/j.tsf.2009.12.114
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electromechanical response of a square-periodic array of circular piezoelectric (PE) thin films alternating with non-piezoelectric (NPE) films is studied in this paper. The material effects are studied for four film/substrate combinations in absence of NPE films for which it is found that if d(zxx) << d(zzz), (z-axis being normal to the interfacial plane between the film and the substrate), it results in reduced substrate bending leading to reduced degradation in the electromechanical response of the thin film. The bi-island structure is studied for zinc oxide on strontium titanate, and, in general, it is seen that the NPE films not only reduce degradation of the electromechanical response of the PE films but also increase their internal stresses; the effect on the former is less than the latter. These effects are most prominent when the circular NPE thin films fill the space between the PE thin films and are elastically very stiff compared to the substrate. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:3844 / 3852
页数:9
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