The effect of RF power on tribological properties of the diamond-like carbon films

被引：24
|
作者：
Choi, WS
Heo, J
Chung, I
Hong, B [1 ]
机构：
[1] Sungkyunkwan Univ, Sch Informat & Commun Engn, Suwon 440746, South Korea
[2] Sungkyunkwan Univ, Ctr Adv Plasma Surface Technol, Suwon 440746, South Korea
来源：
THIN SOLID FILMS | 2005年 / 475卷 / 1-2期
关键词：
atomic force microscopy; diamond-like carbon; friction force microscopy; surface roughness; tribology;
D O I：
10.1016/j.tsf.2004.07.033
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
DLC thin films were prepared by radio frequency (RF) plasma-enhanced chemical vapor deposition (PECVD) method on silicon substrates using methane (CH4), hydrogen (H-2) and gas mixture. We have checked the influence of varying RF power on DLC film. The Raman spectroscopy shows the diamond-like carbon (DLC) amorphous structure of the films. AFM images show the surface roughness of the DLC film decrease with increasing RF power. Also, the friction coefficients were investigated by atomic force microscope (AFM) in triction force microscope (FFM) mode. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：287 / 290
页数：4
相关论文
共 50 条
  • [1] Tribological Properties of Annealed Diamond-like Carbon Film Synthesized by RF PECVD Method
    Choi, Won Seok
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2006, 7 (03) : 118 - 122
  • [2] The effect of annealing on mechanical and tribological properties of diamond-like carbon multilayer films
    Zhang, W
    Tanaka, A
    Wazumi, K
    Koga, Y
    Xu, BS
    DIAMOND AND RELATED MATERIALS, 2004, 13 (11-12) : 2166 - 2169
  • [3] Tribological properties of segment-structured diamond-like carbon films
    Aoki, Y
    Ohtake, N
    TRIBOLOGY INTERNATIONAL, 2004, 37 (11-12) : 941 - 947
  • [4] Effect of polymeric debris on the tribological behavior of diamond-like carbon films
    Eun, KY
    Lee, KR
    Yoon, ES
    Kong, HS
    SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3): : 569 - 574
  • [5] The role of hydrogen in tribological properties of diamond-like carbon films
    Erdemir, A
    SURFACE & COATINGS TECHNOLOGY, 2001, 146 : 292 - 297
  • [6] Influence of currents on tribological behavior of diamond-like carbon films
    Wang, Yan
    Zhang, Minglan
    Wang, Yunfeng
    Zhang, Guangan
    Lu, Zhibin
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2020, 126 (04):
  • [7] Tribological properties of diamond-like carbon films deposited by vacuum arc
    Ren, Ying
    Wang, Haikuo
    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH, 2018, 109 (07) : 654 - 660
  • [8] Diamond-like carbon films for tribological modification of rubber
    Liu, Jiaqi
    Yang, Tao
    Cao, Huatang
    Deng, Qiaoyuan
    Pan, Changjiang
    Wen, Feng
    NANOTECHNOLOGY REVIEWS, 2022, 11 (01) : 2839 - 2856
  • [9] Synthesis and tribological properties of diamond-like carbon films by electrochemical anode deposition
    Li, Yang
    Zhang, GuiFeng
    Hou, XiaoDuo
    Deng, DeWei
    APPLIED SURFACE SCIENCE, 2012, 258 (17) : 6527 - 6530
  • [10] Influences of ultraviolet irradiation on structure and tribological properties of diamond-like carbon films
    Ji, Li
    Li, Hongxuan
    Zhao, Fei
    Quan, Weilong
    Chen, Jianmin
    Zhou, Huidi
    APPLIED SURFACE SCIENCE, 2009, 255 (20) : 8409 - 8413
12345