共 50 条
- [31] MEMS/MOEMS application to optical communication MICROFLUIDICS AND BIOMEMS, 2001, 4560 : XIX - XXV
- [33] MEMS/MOEMS application to optical communication MOEMS AND MINIATURIZED SYSTEMS II, 2001, 4561 : XIX - XXV
- [35] Modular packaging concept for MEMS and MOEMS 28TH MICROMECHANICS AND MICROSYSTEMS EUROPE WORKSHOP, 2017, 922
- [36] Packaging of MEMS and MOEMS for harsh environments JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (02):
- [37] THEORY AND PRACTICE OF MEMS/NEMS/MOEMS, RF MEMS, AND BIOMEMS JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 8 (02):
- [38] New method for reduction of corner undercutting in anisotropic KOH etching, and applications to MEMS and MOEMS DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 1091 - 1098
- [39] Design for reliability of MEMS/MOEMS for lightwave telecommunications 2002 IEEE/LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2002, : 418 - 419
- [40] New applications for MOEMS MOEMS DISPLAY, IMAGING, AND MINIATURIZED MICROSYSTEMS IV, 2006, 6114