Deposition of zirconium oxide using atmospheric pressure plasma enhanced chemical vapor deposition with various precursors

被引：5

作者：

Patel, Dhruval ^{[1
]}

Bonova, Lucia ^{[1
,2
]}

Jeckell, Zachary ^{[1
]}

Barlaz, D. Eitan ^{[1
]}

Chaudhuri, Santanu ^{[3
]}

Krogstad, Daniel, V ^{[4
]}

Ruzic, David N. ^{[1
]}

机构：

[1] Univ Illinois, Nucl Plasma Radiol Engn, 104 South Wright St, Urbana, IL 61801 USA

[2] Slovak Univ Technol Bratislava, Adv Technol Res Inst, Jana Bottu 25, Trnava 91724, Slovakia

[3] Univ Illinois, Civil Mat & Environm Engn, Engn Res Facil 2095, 842 W Taylor St, Chicago, IL 60607 USA

[4] Appl Res Inst, 2100 S Oak St, Champaign, IL 61820 USA

来源：

THIN SOLID FILMS | 2021年 / 733卷

关键词：

Atmospheric pressure plasma; Zirconia; Liquid assisted plasma enhanced chemical vapor deposition; Zirconium oxynitrate hydrate; Zirconium tert-butoxide; Zirconium acetylacetonate; CONVERSION COATINGS; METAL ALKOXIDES; LOW-TEMPERATURE; FILMS; ZRO2; DECOMPOSITION; PRETREATMENT; FABRICATION;

D O I：

10.1016/j.tsf.2021.138815

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页数：8

共 40 条

[1]

B L, 2020, J VAC SCI TECHNOL A, V38

[2] CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF ZRO2 FILMS FROM ORGANOMETALLIC COMPOUNDS [J].

BALOG, M ;

SCHIEBER, M ;

MICHMAN, M ;

PATAI, S .

THIN SOLID FILMS, 1977, 47 (02) :109-120

[3] Zirconium Dioxide Thin Films Characterized by XPS [J].

Barreca, Davide ;

Battiston, Giovanni A. ;

Tondello, Eugenio ;

Zanella, Pierino .

Surface Science Spectra, 2000, 7 (04) :303-309

[4] VAPOUR PRESSURES OF METAL ALKOXIDES .1. TITANIUM TETRA-TERT-BUTOXIDE AND TETRA-TERT-AMYLOXIDE [J].

BRADLEY, DC ;

SWANWICK, JD .

JOURNAL OF THE CHEMICAL SOCIETY, 1958, (SEP) :3207-3214

[5] METAL ALKOXIDES AS PRECURSORS FOR ELECTRONIC AND CERAMIC MATERIALS [J].

BRADLEY, DC .

CHEMICAL REVIEWS, 1989, 89 (06) :1317-1322

[6] PLASMA ASSISTED PHYSICAL VAPOR-DEPOSITION PROCESSES - A REVIEW [J].

BUNSHAH, RF ;

DESHPANDEY, CV .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1985, 3 (03) :553-560

[7] PLASMA ASSISTED DEPOSITION TECHNIQUES AND SYNTHESIS OF NOVEL MATERIALS [J].

DESHPANDEY, C ;

BUNSHAH, RF .

THIN SOLID FILMS, 1988, 163 :131-147

[8] Effects of pH and temperature on the deposition properties of stannate chemical conversion coatings formed by the potentiostatic technique on AZ91 D magnesium alloy [J].

Elsentriecy, Hassan H. ;

Azumi, Kazuhisa ;

Konno, Hidetaka .

ELECTROCHIMICA ACTA, 2008, 53 (12) :4267-4275

[9]

Hong J., 2013, Atmospheric Pressure Plasma Chemical Deposition by Using Dielectric Barrier Discharge System

[10] CHARACTERIZATION OF THE DECOMPOSITION PRODUCTS OF ZIRCONIUM ACETYLACETONATE - NITROGEN ADSORPTION AND SPECTROTHERMAL INVESTIGATION [J].

ISMAIL, HM .

POWDER TECHNOLOGY, 1995, 85 (03) :253-259

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