Chalcogenide waveguide for IR optical range

被引:3
作者
Anne, M. L. [1 ]
Nazabal, V. [1 ]
Moizan, V. [1 ]
Boussard-Pledel, C. [1 ]
Bureau, B. [1 ]
Adam, J. L. [1 ]
Nemec, P. [2 ]
Frumar, M. [2 ]
Moreac, A. [3 ]
Lhermite, H. [4 ]
Camy, P. [5 ]
Doualan, J. L. [5 ]
Guin, J. P. [6 ]
Le Person, J. [7 ]
Colas, F. [7 ]
Compere, C. [7 ]
Lehaitre, M. [7 ]
Henrio, F.
Bosc, D. [8 ,9 ]
Charrier, J. [8 ,9 ]
Jurdyc, A. -M. [10 ]
Jacquier, B. [10 ]
机构
[1] Univ Rennes 1, CNRS 6226, UMR, F-35042 Rennes, France
[2] Univ Pardubice, Pardubice, Czech Republic
[3] Univ Rennes 1, UMR CNRS 6226, Grp Mat Condensee Materiaux, F-35042 Rennes, France
[4] Univ Rennes 1, IETR Microelect, F-35042 Rennes, France
[5] Univ Caen, CNRS CEA ENSICAEN, CIRIL, UMR 6637, F-14050 Caen, France
[6] Univ Rennes 1, LARMAUR, FRE CNRS 2717, F-35042 Rennes, France
[7] IFREMER, Serv Interfaces Capteurs, F-29280 Plouzane, France
[8] CCLO, F-22305 Lannion, France
[9] FOTON, UMR ENSSAT 6082, F-22305 Lannion, France
[10] Univ Lyon 1, LPCML, Lyon, France
来源
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XI | 2007年 / 6475卷
关键词
sulphide glasses; PLD; RF-sputtering; rib waveguides; optical properties; functionalisation;
D O I
10.1117/12.700526
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Due to remarkable properties of the chalcogenide glasses, especially sulphide glasses, amorphous chalcogenide films should play a motivating role in the development of integrated planar optical circuits and their components. This paper describes the fabrication and properties of optical waveguides of pure and rare earth doped sulphide glass films prepared by two complementary techniques: RF magnetron sputtering and pulsed laser deposition (PLD). The deposition parameters were adjusted to obtain, from sulphide glass targets with a careful control of their purity, layers with appropriate compositional, morphological, structural characteristics and optical properties. These films have been characterized by micro-Raman spectroscopy, atomic force microscopy (AFM), X-ray diffraction technique (XRD) and scanning electron microscopy (SEM) coupled with energy dispersive X-ray measurements (EDX). Their optical properties were measured thanks to m-lines prism coupling and near field methods. Rib waveguides were produced by dry etching under CF4, CHF3 and SF6 atmosphere. The photo-luminescence of rare earth doped GeGaSbS films were clearly observed in the n-IR spectral domain and the study of their decay lifetime will be presented. First tests were carried out to functionalise the films with the aim of using them as sensor.
引用
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页数:10
相关论文
共 17 条
[1]   Thin chalcogenide films prepared by pulsed laser deposition - new amorphous materials applicable in optoelectronics and chemical sensors [J].
Frumar, M. ;
Frumarova, B. ;
Nemec, P. ;
Wagner, T. ;
Jedelsky, J. ;
Hrdlicka, M. .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (6-7) :544-561
[2]   Thin films of Sb2S3 doped by Sm3+ ions [J].
Frumarová, B ;
Bílková, M ;
Frumar, M ;
Repka, M ;
Jedelsky, J .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2003, 326 :348-352
[3]   High second-order nonlinear susceptibility induced in chalcogenide glasses by thermal poling [J].
Guignard, M ;
Nazabal, V ;
Smektala, F ;
Zeghlache, H ;
Kudlinski, A ;
Quiquempois, Y ;
Martinelli, G .
OPTICS EXPRESS, 2006, 14 (04) :1524-1532
[4]  
HUANG CC, OPTICS EXPRESS, V12, P2501
[5]   RAMAN AND INFRARED SPECTROSCOPIC STUDIES OF GE-GA-AG SULFIDE GLASSES [J].
JULIEN, C ;
BARNIER, S ;
MASSOT, M ;
CHBANI, N ;
CAI, X ;
LOIREAULOZACH, AM ;
GUITTARD, M .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1994, 22 (2-3) :191-200
[6]   STRUCTURAL INTERPRETATION OF INFRARED AND RAMAN-SPECTRA OF GLASSES IN ALLOY SYSTEM GE1-XSX [J].
LUCOVSKY, G ;
GALEENER, FL ;
KEEZER, RC ;
GEILS, RH ;
SIX, HA .
PHYSICAL REVIEW B, 1974, 10 (12) :5134-5146
[7]   Optical properties and structure of amorphous (As0.33S0.67)100-xTex and GexSb40-xS60 chalcogenide semiconducting alloy films deposited by vacuum thermal evaporation [J].
Marquez, E. ;
Bernal-Oliva, A. M. ;
Gonzalez-Leal, J. M. ;
Prieto-Alcon, R. ;
T Wagner .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2006, 39 (09) :1793-1799
[8]   Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition [J].
Nazabal, V. ;
Nemec, P. ;
Jedelsky, J. ;
Duverger, C. ;
Le Person, J. ;
Adam, J. L. ;
Frumar, M. .
OPTICAL MATERIALS, 2006, 29 (2-3) :273-278
[9]   Oxyfluoride tellurite glasses doped by erbium: thermal analysis, structural organization and spectral properties [J].
Nazabal, V ;
Todoroki, S ;
Nukui, A ;
Matsumoto, T ;
Suehara, S ;
Hondo, T ;
Araki, T ;
Inoue, S ;
Rivero, C ;
Cardinal, T .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2003, 325 (1-3) :85-102
[10]   Excitation of Er3+ emission by host glass absorption in sputtered films of Er-doped Ge10As40Se25S25 glass [J].
Ramachandran, S ;
Bishop, SG .
APPLIED PHYSICS LETTERS, 1998, 73 (22) :3196-3198