Effect of Pb content in target on electrical properties of laser ablation derived lead zirconate titanate thin films

被引：62

作者：

Wang, ZJ ^{[1
]}

Kikuchi, K ^{[1
]}

Maeda, R ^{[1
]}

机构：

[1] Minist Int Trade & Ind, Agcy Ind Sci & Technol, Mech Engn Lab, Tsukuba, Ibaraki 3058564, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 9B期

关键词：

lead zirconate titanate (PZT); ceramics; laser ablation; microstructure; ferroelectric properties; dielectric properties;

D O I：

10.1143/JJAP.39.5413

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin films of Pb(Zr0.52Ti0.48)O-3 (PZT) 1.8-2.0 mum thick on a Pt/Ti/SiO2/Si substrate were prepared by excimer laser ablation and were crystallized by subsequent annealing. Crystalline phases in the PZT films were investigated by X-ray diffraction analysis (XRD). The microstructure and composition of the films were studied by scanning electron microscopy (SEM) and electron probe microanalysis (EPMA), respectively. The effect of the Pb content of the target on electrical properties of PZT thin films was investigated. The PZT films with a well-crystallized perovskite phase were obtained by adding 20 wt.% excess PbO to the target and annealing at 750 degreesC for 90 min. The remanent polarization and the coercive field of this 0.8 mum think film were 23.6 muC/cm(2) and 60.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 935 and 0.04, respectively.

引用

页码：5413 / 5417

页数：5

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