New concepts for a fiber based system for absolute distance measurements

被引：2
|
作者：
Bosbach, C [1 ]
Pfeifer, T [1 ]
Depiereux, F [1 ]
机构：
[1] Fraunhofer Inst Prod Technol IPT, D-52074 Aachen, Germany
来源：
TECHNISCHES MESSEN | 2003年 / 70卷 / 02期
关键词：
fiber based distance measurement system; stepped mirror; twin interferometry;
D O I：
10.1524/teme.70.2.85.20103
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The use of miniaturized parts or products has been established for many years e.g. in telecommunications or in the automotive industry. Efficent production processes are however still an issue and solutions are in many cases not available yet or are not satisfying. Even metrology based process control shows development potential for optical metrology. The paper presents the development of a fiber-based distance measuring system and its applications.
引用
收藏
页码：85 / 92
页数：8
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