Interaction between depolarization effects, interface layer, and fatigue behavior in PZT thin film capacitors

被引:14
作者
Boettger, U. [1 ]
Waser, R. [1 ,2 ]
机构
[1] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech 2, D-52056 Aachen, Germany
[2] Forschungszentrum Julich GmbH, Peter Grunberg Inst 7, D-52425 Julich, Germany
关键词
LEAD-ZIRCONATE-TITANATE; INTERNAL BIAS; THICKNESS; CERAMICS; FERROELECTRICITY; POLARIZATION; FIELDS; STATE;
D O I
10.1063/1.4992812
中图分类号
O59 [应用物理学];
学科分类号
摘要
The existence of non-ferroelectric regions in ferroelectric thin films evokes depolarization effects leading to a tilt of the P(E) hysteresis loop. The analysis of measured hysteresis of lead zirconate titanate (PZT) thin films is used to determine a depolarization factor which contains quantitative information about interfacial layers as well as ferroelectrically passive zones in the bulk. The derived interfacial capacitance is smaller than that estimated from conventional extrapolation techniques. In addition, the concept of depolarization is used for the investigation of fatigue behavior of PZT thin films indicating that the mechanism of seed inhibition, which is responsible for the effect, occurs in the entire film. Published by AIP Publishing.
引用
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页数:6
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